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H2MEMS Project: Resonant MEMS for Detection of Hydrogen Release in Radioactive Waste Disposal Facility1

dc.rights.licenseopenen_US
hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
dc.contributor.authorDUFOUR, Isabelle
hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
dc.contributor.authorIGLESIAS HERNANDEZ, Luis
dc.contributor.authorSHANMUGAM, Priyadarshini
dc.contributor.authorMICHAUD, Jean-François
dc.contributor.authorCOLIN, Laurent
dc.contributor.authorALQUIER, Daniel
dc.contributor.authorCERTON, Dominique
dc.contributor.authorMANRIQUE-JUAREZ, Maria-Dolores
dc.contributor.authorLEICHLE, Thierry
dc.contributor.authorMATHIEU, Fabrice
dc.contributor.authorMAZENQ, Laurent
dc.contributor.authorNICU, Liviu
dc.contributor.authorNGUYEN, Luan
dc.contributor.authorCHENOT, Sébastien
dc.contributor.authorPORTAIL, Marc
dc.contributor.authorBERTRAND, Johan
dc.date.accessioned2023-05-02T08:50:47Z
dc.date.available2023-05-02T08:50:47Z
dc.date.issued2022-04
dc.date.conference2022-04-24
dc.identifier.issn2473-2001en_US
dc.identifier.urihttps://oskar-bordeaux.fr/handle/20.500.12278/173227
dc.description.abstractEnSummaryThe H2MEMS project aims at developing and optimizing hydrogen sensors based on resonant MEMS for detection of hydrogen release in radioactive waste disposal facility. The principle adopted is based on measuring physical properties of the gas (mass density, viscosity, sound velocity and sound absorption) without requiring any sensitive layer. For this purpose, resonant microcantilevers and CMUT were used.
dc.language.isoENen_US
dc.subjectResonant MEMS
dc.subjectCMUT
dc.subjectMicrocantilever
dc.subjectGas detection
dc.subjectResonant frequency
dc.subjectQuality factor
dc.subjectTime of flight
dc.subjectViscosity
dc.subjectMass density
dc.subjectSound attenuation
dc.subjectHydrogen detection
dc.title.enH2MEMS Project: Resonant MEMS for Detection of Hydrogen Release in Radioactive Waste Disposal Facility1
dc.typeCommunication dans un congrès avec actesen_US
dc.identifier.doi10.1109/EFTF/IFCS54560.2022.9850611en_US
dc.subject.halSciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectroniqueen_US
bordeaux.page1-2en_US
bordeaux.hal.laboratoriesIMS : Laboratoire de l'Intégration du Matériau au Système - UMR 5218en_US
bordeaux.institutionUniversité de Bordeauxen_US
bordeaux.institutionBordeaux INPen_US
bordeaux.institutionCNRSen_US
bordeaux.conference.title2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)en_US
bordeaux.countryfren_US
bordeaux.title.proceedingH2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facilityen_US
bordeaux.teamORGANIQUE-PRIMSen_US
bordeaux.conference.cityParisen_US
bordeaux.peerReviewedouien_US
hal.exportfalse
dc.rights.ccPas de Licence CCen_US
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