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H2MEMS Project: Resonant MEMS for Detection of Hydrogen Release in Radioactive Waste Disposal Facility1
dc.rights.license | open | en_US |
hal.structure.identifier | Laboratoire de l'intégration, du matériau au système [IMS] | |
dc.contributor.author | DUFOUR, Isabelle | |
hal.structure.identifier | Laboratoire de l'intégration, du matériau au système [IMS] | |
dc.contributor.author | IGLESIAS HERNANDEZ, Luis | |
dc.contributor.author | SHANMUGAM, Priyadarshini | |
dc.contributor.author | MICHAUD, Jean-François | |
dc.contributor.author | COLIN, Laurent | |
dc.contributor.author | ALQUIER, Daniel | |
dc.contributor.author | CERTON, Dominique | |
dc.contributor.author | MANRIQUE-JUAREZ, Maria-Dolores | |
dc.contributor.author | LEICHLE, Thierry | |
dc.contributor.author | MATHIEU, Fabrice | |
dc.contributor.author | MAZENQ, Laurent | |
dc.contributor.author | NICU, Liviu | |
dc.contributor.author | NGUYEN, Luan | |
dc.contributor.author | CHENOT, Sébastien | |
dc.contributor.author | PORTAIL, Marc | |
dc.contributor.author | BERTRAND, Johan | |
dc.date.accessioned | 2023-05-02T08:50:47Z | |
dc.date.available | 2023-05-02T08:50:47Z | |
dc.date.issued | 2022-04 | |
dc.date.conference | 2022-04-24 | |
dc.identifier.issn | 2473-2001 | en_US |
dc.identifier.uri | https://oskar-bordeaux.fr/handle/20.500.12278/173227 | |
dc.description.abstractEn | SummaryThe H2MEMS project aims at developing and optimizing hydrogen sensors based on resonant MEMS for detection of hydrogen release in radioactive waste disposal facility. The principle adopted is based on measuring physical properties of the gas (mass density, viscosity, sound velocity and sound absorption) without requiring any sensitive layer. For this purpose, resonant microcantilevers and CMUT were used. | |
dc.language.iso | EN | en_US |
dc.subject | Resonant MEMS | |
dc.subject | CMUT | |
dc.subject | Microcantilever | |
dc.subject | Gas detection | |
dc.subject | Resonant frequency | |
dc.subject | Quality factor | |
dc.subject | Time of flight | |
dc.subject | Viscosity | |
dc.subject | Mass density | |
dc.subject | Sound attenuation | |
dc.subject | Hydrogen detection | |
dc.title.en | H2MEMS Project: Resonant MEMS for Detection of Hydrogen Release in Radioactive Waste Disposal Facility1 | |
dc.type | Communication dans un congrès avec actes | en_US |
dc.identifier.doi | 10.1109/EFTF/IFCS54560.2022.9850611 | en_US |
dc.subject.hal | Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique | en_US |
bordeaux.page | 1-2 | en_US |
bordeaux.hal.laboratories | IMS : Laboratoire de l'Intégration du Matériau au Système - UMR 5218 | en_US |
bordeaux.institution | Université de Bordeaux | en_US |
bordeaux.institution | Bordeaux INP | en_US |
bordeaux.institution | CNRS | en_US |
bordeaux.conference.title | 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) | en_US |
bordeaux.country | fr | en_US |
bordeaux.title.proceeding | H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility | en_US |
bordeaux.team | ORGANIQUE-PRIMS | en_US |
bordeaux.conference.city | Paris | en_US |
bordeaux.peerReviewed | oui | en_US |
hal.export | false | |
dc.rights.cc | Pas de Licence CC | en_US |
bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.date=2022-04&rft.spage=1-2&rft.epage=1-2&rft.eissn=2473-2001&rft.issn=2473-2001&rft.au=DUFOUR,%20Isabelle&IGLESIAS%20HERNANDEZ,%20Luis&SHANMUGAM,%20Priyadarshini&MICHAUD,%20Jean-Fran%C3%A7ois&COLIN,%20Laurent&rft.genre=proceeding |