YAMAGUCHI, Takafumi; USAMI, Naoto; MISUMI, Kei; TOYOKURA, Atsushi; HIGO, Akio; ONO, Shimpei; HWANG, Gilgueng; LARRIEU, Guilhem; IKEUCHI, Yoshiho; TIXIER-MITA, Agnes; SAITO, Ken; LEVI, Timothee; MITA, Yoshio

doi:10.1109/JMEMS.2022.3187428

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Journal of Microelectromechanical Systems. 2022-07-29, vol. 31, n° 5, p. 802-812

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We present a self-deformable flexible tweezer capable of simultaneous mechanical handling and electrical measurements. The tweezer has a soft cantilever with the dimensions 2 mm ×8 mm × 75- 100 μm , and undergoes self-deformation. The device is shown to be successfully capable of detecting electrical signals by gently touching the surface and grasping a spherical bead. The device demonstrated the lowest working voltage (1.5 VDC), force suitable for soft gripping, and curvature radius of 2 mm, that was one of the smallest values compared to that of similar state-of-the-art devices. The device was fabricated using a unique and highly reliable process that was specifically developed to produce flexible cantilevers with novel ionic polymer-metal composites (IPMCs). The materials used were poly(vinylidene fluoride-co-trifluoroethylene) (PVDF-TrFE) and an ionic liquid (IL). The PVDF-TrFE/IL gel was prepared using acetone as the solvent and the gel was coated with silver nanowires as the electrodes. The actuator with a length of 8 mm and containing 50 wt% IL yielded the largest bending displacement of 7 mm and minimum curvature radius of 2 mm at 1.5 VDC. [2022-0026]< Réduire

Mots clés en anglais

Electrical detection

Flexible actuator

Ionic liquid

PVDF-TrFE

Self-deformable cantilever

Silver nanowire

Soft gripping

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Self-Deformable Flexible MEMS Tweezer Composed of Poly(Vinylidene Fluoride)/Ionic Liquid Gel for Electrical Measurements and Soft Gripping

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