High sensitivity and high resolution differential interferometer: Micrometric polariscope for thermomechanical studies in microelectronics
Langue
en
Article de revue
Ce document a été publié dans
Microelectronics Reliability. 1997-10, vol. 37, n° 10-11, p. 1587-1590
Elsevier
Résumé en anglais
A high sensitivity and high resolution laser probe devoted to the thermomechanical studies of microelectronic interconnects has been developed. Surface displacements as low as 0.1 picometer (10−13m) can be observed, this ...Lire la suite >