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Thermoreflectance measurements of transient temperature upon integrated circuits: application to thermal conductivity identification

hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorPHAN, T.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorDILHAIRE, S.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorQUINTARD, V.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorCLAEYS, W.
hal.structure.identifierLaboratoire Energétique et Phénomènes de Transfert [Talence] [LEPT]
dc.contributor.authorBATSALE, J. C.
dc.date.issued1998-04
dc.identifier.issn0026-2714
dc.description.abstractEnAn analytical 2D study, based on the method of integral transform, for transient heat transfer in a multilayered structure, and an optical technique for transient temperature measurement have been developed. Their application to the case of Joule heating of micrometric interconnections on submicron insulation layers permits one to identify thermophysical properties of the materials involved.
dc.language.isoen
dc.publisherElsevier
dc.title.enThermoreflectance measurements of transient temperature upon integrated circuits: application to thermal conductivity identification
dc.typeArticle de revue
dc.identifier.doi10.1016/s0026-2692(97)00056-6
dc.subject.halPhysique [physics]
bordeaux.journalMicroelectronics Reliability
bordeaux.page181-190
bordeaux.volume29
bordeaux.issue4-5
bordeaux.peerReviewedoui
hal.identifierhal-01550255
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-01550255v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Microelectronics%20Reliability&rft.date=1998-04&rft.volume=29&rft.issue=4-5&rft.spage=181-190&rft.epage=181-190&rft.eissn=0026-2714&rft.issn=0026-2714&rft.au=PHAN,%20T.&DILHAIRE,%20S.&QUINTARD,%20V.&CLAEYS,%20W.&BATSALE,%20J.%20C.&rft.genre=article


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