Imaging setup for temperature, topography, and surface displacement measurements of microelectronic devices
Langue
en
Article de revue
Ce document a été publié dans
Review of Scientific Instruments. 2003-01, vol. 74, n° 1, p. 645-647
American Institute of Physics
Résumé en anglais
We present an imaging system that enables the extraction of three different types of information: First, the topography measurement of an electronic device at rest; then, two other informations are obtained when the same ...Lire la suite >