Imaging setup for temperature, topography, and surface displacement measurements of microelectronic devices
Language
en
Article de revue
This item was published in
Review of Scientific Instruments. 2003-01, vol. 74, n° 1, p. 645-647
American Institute of Physics
English Abstract
We present an imaging system that enables the extraction of three different types of information: First, the topography measurement of an electronic device at rest; then, two other informations are obtained when the same ...Read more >
We present an imaging system that enables the extraction of three different types of information: First, the topography measurement of an electronic device at rest; then, two other informations are obtained when the same device is submitted to a transient current: on one hand, the induced surface displacement and on the other hand, the qualitative surface temperature variations field. The same bench includes two imaging techniques, one based upon interferometry, the other upon thermoreflectance, both of them using a light-emitting diode as a source of light. Results on a microheater are presented.Read less <
Origin
Hal imported