Application of picosecond ultrasonics to non-destructive analysis in VLSI circuits
Langue
en
Article de revue
Ce document a été publié dans
Microelectronics Reliability. 2003-09, vol. 43, n° 9-11, p. 1803-1807
Elsevier
Résumé en anglais
Picosecond ultrasonics is an optical non-destructive technique based on ultrasound generation and detection by ultrashort laser pulses. We demonstrate the efficiency of this technique for material characterization in VLSI ...Lire la suite >