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hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorDILHAIRE, S.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorGRAUBY, Stéphane
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorCLAEYS, W.
dc.date.issued2004-02-02
dc.identifier.issn0003-6951
dc.description.abstractEnWe show that, in thermoreflectance measurements under high focusing conditions, the signal is not only due to the surface temperature variations. Indeed, the reflected light from the device under test interferes with the incoming one, making a parasitic Fabry-Pérot. Besides, the motion of the sample surface induced, for example, by Joule heating, can produce an additional signal superimposed on the thermoreflectance one. Consequently, reliable thermoreflectance measurements under high focusing conditions, and particularly their calibration, demand a control of the distance between the objective and the sample. Using a servo loop to maintain the distance between the objective and the device constant, thermoreflectance measurements have been made in transient regime on an electronic device and the thermoreflectance coefficient of gold has been deduced.
dc.language.isoen
dc.publisherAmerican Institute of Physics
dc.subject.enOptical metrology
dc.subject.enElectronic devices
dc.subject.enTransition metals
dc.subject.enThermodynamic states and processes
dc.title.enCalibration procedure for temperature measurements by thermoreflectance under high magnification conditions
dc.typeArticle de revue
dc.identifier.doi10.1063/1.1645326
dc.subject.halPhysique [physics]
bordeaux.journalApplied Physics Letters
bordeaux.page822-824
bordeaux.volume84
bordeaux.issue5
bordeaux.peerReviewedoui
hal.identifierhal-01551923
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-01551923v1
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