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Study of thermomechanical properties of Si/SiGe superlattices using femtosecond transient thermoreflectance technique
hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
dc.contributor.author | EZZAHRI, Y. | |
hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
dc.contributor.author | DILHAIRE, S. | |
hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
dc.contributor.author | GRAUBY, Stéphane | |
hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
dc.contributor.author | RAMPNOUX, Jean-Michel | |
hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
dc.contributor.author | CLAEYS, W. | |
hal.structure.identifier | Jack Baskin School of Engineering [UCSC] | |
dc.contributor.author | ZHANG, Y. | |
hal.structure.identifier | Jack Baskin School of Engineering [UCSC] | |
dc.contributor.author | ZENG, G. | |
hal.structure.identifier | Jack Baskin School of Engineering [UCSC] | |
dc.contributor.author | SHAKOURI, A. | |
dc.date.issued | 2005-09-05 | |
dc.identifier.issn | 0003-6951 | |
dc.description.abstractEn | Using a Femtosecond Transient Thermoreflectance (FTT) technique, we studied the thermomechanical properties of two Si∕SiGe superlattices. A theoretical model is presented which agrees well with the experimental results and allows us to determine the cross-plan thermal conductivity of the superlattices at room temperature. We also show that, from the experimental curve, we can extract the thickness of the metallic film, the longitudinal sound velocity and the refractive index of the superlattice using acoustic echoes and Brillouin oscillation data. | |
dc.language.iso | en | |
dc.publisher | American Institute of Physics | |
dc.subject.en | Acoustical properties | |
dc.subject.en | Thin films | |
dc.subject.en | Chemical elements | |
dc.subject.en | Semiconductors | |
dc.subject.en | Thermomechanical analysis | |
dc.subject.en | Acoustic phenomena | |
dc.subject.en | Optical metrology | |
dc.subject.en | Superlattices | |
dc.subject.en | Thermal conductivity | |
dc.subject.en | Optical properties | |
dc.title.en | Study of thermomechanical properties of Si/SiGe superlattices using femtosecond transient thermoreflectance technique | |
dc.type | Article de revue | |
dc.identifier.doi | 10.1063/1.2009069 | |
dc.subject.hal | Physique [physics] | |
bordeaux.journal | Applied Physics Letters | |
bordeaux.page | 103506 (1-3) | |
bordeaux.volume | 87 | |
bordeaux.issue | 10 | |
bordeaux.peerReviewed | oui | |
hal.identifier | hal-01552727 | |
hal.version | 1 | |
hal.popular | non | |
hal.audience | Internationale | |
hal.origin.link | https://hal.archives-ouvertes.fr//hal-01552727v1 | |
bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Applied%20Physics%20Letters&rft.date=2005-09-05&rft.volume=87&rft.issue=10&rft.spage=103506%20(1-3)&rft.epage=103506%20(1-3)&rft.eissn=0003-6951&rft.issn=0003-6951&rft.au=EZZAHRI,%20Y.&DILHAIRE,%20S.&GRAUBY,%20St%C3%A9phane&RAMPNOUX,%20Jean-Michel&CLAEYS,%20W.&rft.genre=article |
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