GRAUBY, Stéphane; SALHI, A.; PATINO LOPEZ, L.D.; DILHAIRE, S.; CHARLOT, B.; CLAEYS, W.; CRETIN, B.; TESSIER, G.; TRANNOY, N.; VAIRAC, P.; VOLZ, S.

Métadonnées

Afficher la notice complète

Licence d’utilisation du document

GRAUBY, Stéphane
Centre de physique moléculaire optique et hertzienne [CPMOH]

SALHI, A.
Centre de physique moléculaire optique et hertzienne [CPMOH]

PATINO LOPEZ, L.D.
Centre de physique moléculaire optique et hertzienne [CPMOH]

Langue

Communication dans un congrès

Ce document a été publié dans

THERMINIC 2005, 2005-09, Belgirate, Lago Maggiore. 2005-09p. 284-289

TIMA Editions

Résumé en anglais

We have studied temperature variations on two dissipative structures with two different techniques. The dissipative structures are constituted of thin (0.35µm) dissipative resistors, the distance between two resistors being equal to 0.8 or 10 µm. On one hand, we have used a thermoreflectance imaging technique which is a well-known non contact optical method to evaluate temperature variations but whose spatial resolution is limited by diffraction. On the other hand, we have used a Scanning Thermal Microscope (SThM) to study the thermal behaviour of these small dissipative structures. We compare qualitative results obtained by both methods and we present their advantages and limitations for temperature measurements on microelectronic devices.< Réduire

Mots clés en anglais

Thermal imaging

spatial resolution

scanning thermal microscopy

Origine

Importé de hal

Unités de recherche

Laboratoire Ondes et Matière d'Aquitaine (LOMA) - UMR 5798