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Joule Expansion Imaging Techniques on Microlectronic Devices
hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
dc.contributor.author | GRAUBY, S. | |
hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
dc.contributor.author | PATINO LOPEZ, , L.-D. | |
hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
dc.contributor.author | SALHI, A. | |
hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
dc.contributor.author | PUYOO, E. | |
hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
dc.contributor.author | RAMPNOUX, J.-M. | |
hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
dc.contributor.author | CLAEYS, W. | |
hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
dc.contributor.author | DILHAIRE, S. | |
dc.date.issued | 2007-09 | |
dc.date.conference | 2007-09 | |
dc.description.abstractEn | We have studied the electrically induced off-plane surface displacement on two microelectronic devices using Scanning Joule Expansion Microscopy (SJEM). We present the experimental method and surface displacement results. We show that they can be successfully compared with surface displacement images obtained using an optical interferometry method. We also present thermal images using Scanning Thermal Microscopy (SThM) technique to underline that SJEM is more adapted to higher frequency measurements, which should improve the spatial resolution. | |
dc.language.iso | en | |
dc.publisher | EDA Publishing | |
dc.source.title | 13th International Worshop on THERMal INvestigations of ICs and Systems | |
dc.subject.en | Scanning Thermal imaging | |
dc.subject.en | interferometry | |
dc.subject.en | Joule expansion | |
dc.title | Joule Expansion Imaging Techniques on Microlectronic Devices | |
dc.type | Communication dans un congrès | |
dc.subject.hal | Physique [physics]/Matière Condensée [cond-mat]/Science des matériaux [cond-mat.mtrl-sci] | |
dc.identifier.arxiv | 0801.1041 | |
bordeaux.page | 174-179 | |
bordeaux.conference.title | THERMINIC 2007 | |
bordeaux.country | HU | |
bordeaux.title.proceeding | 13th International Worshop on THERMal INvestigations of ICs and Systems | |
bordeaux.conference.city | Budapest | |
bordeaux.peerReviewed | oui | |
hal.identifier | hal-00202556 | |
hal.version | 1 | |
hal.invited | non | |
hal.proceedings | oui | |
hal.popular | non | |
hal.audience | Internationale | |
hal.origin.link | https://hal.archives-ouvertes.fr//hal-00202556v1 | |
bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.title=Joule%20Expansion%20Imaging%20Techniques%20on%20Microlectronic%20Devices&rft.btitle=13th%20International%20Worshop%20on%20THERMal%20INvestigations%20of%20ICs%20and%20Systems&rft.atitle=Joule%20Expansion%20Imaging%20Techniques%20on%20Microlectronic%20Devices&rft.date=2007-09&rft.spage=174-179&rft.epage=174-179&rft.au=GRAUBY,%20S.&PATINO%20LOPEZ,%20,%20L.-D.&SALHI,%20A.&PUYOO,%20E.&RAMPNOUX,%20J.-M.&rft.genre=unknown |
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