Mostrar el registro sencillo del ítem

Joule expansion imaging techniques on microlectronic devices

hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorGRAUBY, Stéphane
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorPATINO LOPEZ, Luis-David
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorSALHI, Amine
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorPUYOO, Etienne
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorRAMPNOUX, Jean-Michel
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorCLAEYS, Wilfrid
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorDILHAIRE, Stefan
dc.date.created2007-10-25
dc.date.issued2009-09
dc.identifier.issn0026-2692
dc.description.abstractEnWe have studied the electrically induced off-plane surface displacement on two microelectronic devices using scanning Joule expansion microscopy (SJEM). We present the experimental method and surface displacement results. We show that they can be successfully compared with surface displacement images obtained using an optical interferometry method. We also present thermal images using scanning thermal microscopy (SThM) technique to underline that SJEM is more adapted to higher frequency measurements. The performances of the three methods are compared.
dc.description.sponsorshipConception, fabrication et EXploration d'un TRAnsistor nanométrique sur un SOI avec un Diélectrique Alternatif contraint à forte conductivité thermique - ANR-06-NANO-0042
dc.language.isoen
dc.publisherElsevier
dc.subjectMicroelectronic devices
dc.subjectTemperature variations
dc.subjectJoule expansion
dc.subjectDisplacement
dc.titleJoule expansion imaging techniques on microlectronic devices
dc.typeArticle de revue
dc.identifier.doi10.1016/j.mejo.2008.04.016
dc.subject.halPhysique [physics]/Matière Condensée [cond-mat]/Science des matériaux [cond-mat.mtrl-sci]
dc.identifier.arxiv0801.1041
bordeaux.journalMicroelectronics Journal
bordeaux.page1367-1372
bordeaux.volume40
bordeaux.issue9
bordeaux.peerReviewedoui
hal.identifierhal-00670328
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-00670328v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.title=Joule%20expansion%20imaging%20techniques%20on%20microlectronic%20devices&rft.atitle=Joule%20expansion%20imaging%20techniques%20on%20microlectronic%20devices&rft.jtitle=Microelectronics%20Journal&rft.date=2009-09&rft.volume=40&rft.issue=9&rft.spage=1367-1372&rft.epage=1367-1372&rft.eissn=0026-2692&rft.issn=0026-2692&rft.au=GRAUBY,%20St%C3%A9phane&PATINO%20LOPEZ,%20Luis-David&SALHI,%20Amine&PUYOO,%20Etienne&RAMPNOUX,%20Jean-Michel&rft.genre=article


Archivos en el ítem

ArchivosTamañoFormatoVer

No hay archivos asociados a este ítem.

Este ítem aparece en la(s) siguiente(s) colección(ones)

Mostrar el registro sencillo del ítem