Microlenses fabricated by ultraviolet excimer laser irradiation of poly(methyl methacrylate) followed by styrene diffusion
Idioma
en
Article de revue
Este ítem está publicado en
Applied optics. 1996-08-01, vol. 35, n° 22, p. 4471-4475
Optical Society of America
Resumen en inglés
A new technique of microlens array fabrication based on the use of excimer laser radiation is described. Poly(methyl methacrylate) (PMMA) substrates are treated with many low-energy KrF laser pulses and exposed to styrene ...Leer más >