HABTOUN, Sabrina; HOUMADI, Saïd; REIG, Benjamin; POUGET, Emilie; DEDOVETS, Dmytro; DELVILLE, Marie-Hélène; ODA, Reiko; CRISTIANO, Fuccio; BERGAUD, Christian

doi:10.1088/2053-1591/aa8e1a

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HABTOUN, Sabrina
Équipe Microsystèmes électromécaniques [LAAS-MEMS]

HOUMADI, Saïd
Équipe NanoBioSystèmes [LAAS-NBS]

REIG, Benjamin
Service Techniques et Équipements Appliqués à la Microélectronique [LAAS-TEAM]

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Article de revue

Este ítem está publicado en

Materials Research Express. 2017-10-01, vol. 4, n° 10

IOP Publishing Ltd

Resumen en inglés

Silica nanosprings (NS) are fabricated by a sol–gel deposition of silica precursors onto a template made of self-assembled organic chiral nanostructures. They are deposited and assembled on microstructured silicon substrates, and then metallized and clamped in a single lithography-free step using a focused ion beam (FIB). The resulting suspended hybrid metallic/inorganic NS are then characterized with high-resolution transmission electron microscopy (HRTEM) and scanning TEM/energy-dispersive X-ray spectroscopy (STEM/EDX), showing the atomic structure of the metallic layer. Three-point bending tests are also carried out using an atomic force microscope (AFM) and supported by finite element method (FEM) simulation with COMSOL Multiphysics allowing the characterization of the mechanical behavior and the estimation of the stiffness of the resulting NS. The information obtained on the structural and mechanical properties of the NS is discussed for future nano-electro-mechanical system (NEMS) applications.< Leer menos

Palabras clave en inglés

atomic force spectroscopy

nanomechanics

nanostructure

nanohelix

nanospring

EBID

FIB

DOI

http://dx.doi.org/10.1088/2053-1591/aa8e1a

Proyecto ANR

Nanohélices hybrides organiques–inorganiques fonctionnelles : étude de phénomènes exaltés à l'échelle nanométrique
Assemblage de type " bottom-up " de Nanohélices fonctionnalisées: un pas de plus vers des dispositifs flexibles. - ANR-15-CE08-0041

Orígen

Importado de Hal

Centros de investigación

Institut de Chimie de la Matière Condensée de Bordeaux (ICMCB) - UMR 5026