LE TREQUESSER, Quentin; MESGUICH, David; YOU, Eunyoung; AYMONIER, Cyril; WATKINS, James J.

doi:10.1016/j.supflu.2011.11.018

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LE TREQUESSER, Quentin
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
Polymer Science and Engineering Department

MESGUICH, David
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
Polymer Science and Engineering Department

YOU, Eunyoung
Polymer Science and Engineering Department
Chemical Engineering Department

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Journal of Supercritical Fluids. 2012, vol. 66, p. 328-332

Elsevier

Résumé en anglais

We report the formation of yttriastabilizedzirconia (YSZ) thin films by supercriticalfluiddeposition (SFD) in carbon dioxide at 20 MPa and a stage temperature of 300 °C via hydrolysis of zirconium(IV) hexafluoroacetylacetonate and yttrium(III) hexafluoroacetylacetonate. Post-deposition annealing of the films at 800 °C yields crystalline films having the expected fluorite structure as evidenced by X-ray diffraction. Such films are suitable for the fabrication of electrolyte thin films for micro-solid oxide fuel cells (μ-SOFC). We show that a cyclic co-deposition process in which aliquots of precursor are introduced sequentially enables the depostion of YSZ thin films with uniform composition as evidenced by X-ray photoelectron spectroscopy. In each cycle, the mixed precursor solution in CO2 is introduced to the reactor and then purged following a short reaction interval. By contrast, simple batch SFD processes that employ hydrolysis of the mixed precursors introduced at the onset of the depositions lead to non-uniform distributions of the cations throughout the thickness of the films. The cyclic deposition approach extends supercriticalfluiddeposition to materials such as multi-cations oxides for which precise control of stoichiometry is required.< Réduire

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Supercritical fluid deposition

Carbon dioxide

Yttria stabilized zirconia thin films

Micro-SOFC

Cyclic deposition

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Supercritical fluid deposition of compositionally uniform yttria stabilized zirconia films

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