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Light-ion beam for microelectronic applications
| dc.contributor.author | HIRSCH, L. | |
| dc.contributor.author | TARDY, P. | |
| dc.contributor.author | WANTZ, G. | |
| dc.contributor.author | HUBY, N. | |
| hal.structure.identifier | Centre d'Etudes Nucléaires de Bordeaux Gradignan [CENBG] | |
| dc.contributor.author | MORETTO, P. | |
| hal.structure.identifier | Centre d'Etudes Nucléaires de Bordeaux Gradignan [CENBG] | |
| dc.contributor.author | SERANI, L. | |
| dc.contributor.author | NATALI, F. | |
| dc.contributor.author | DAMILANO, B. | |
| dc.contributor.author | DUBOZ, J.Y. | |
| dc.contributor.author | REVERCHON, J.L. | |
| dc.contributor.editor | J.-C. Dran, T. Calligaro | |
| dc.date.issued | 2005 | |
| dc.date.conference | 2004-09-20 | |
| dc.identifier.issn | 0168-583X | |
| dc.description.abstractEn | In this paper we describe the structure and the composition of (Al,Ga)N/GaN Bragg reflectors obtained from Rutherford backscattering spectroscopy. Bragg reflectors constitute a part of blue ($\lambda$ = 450 nm) resonant cavity light emitting diodes. To improve the measurement accuracy, three tilt angles have been used (10\degres, 25\degres and 50\degres). In a second part of the paper, ion beam induced charges study has been carried out, with a 2 MeV $^4$He$^+$ micro-beam, on metal–semiconductor–metal UV photodetectors. Results have been taken into account for the design of the photodetector electrodes. | |
| dc.language.iso | en | |
| dc.publisher | Elsevier | |
| dc.source.title | Nuclear Instruments and Methods in Physics Research B | |
| dc.subject.en | RBs | |
| dc.subject.en | IBIC | |
| dc.subject.en | ALGaN | |
| dc.subject.en | UV detectors | |
| dc.subject.en | Bragg reflectors | |
| dc.title.en | Light-ion beam for microelectronic applications | |
| dc.type | Article de revue | |
| dc.identifier.doi | 10.1016/j.nimb.2005.06.127 | |
| dc.subject.hal | Physique [physics]/Physique [physics]/Instrumentations et Détecteurs [physics.ins-det] | |
| bordeaux.journal | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | |
| bordeaux.page | 265-270 | |
| bordeaux.volume | 240 | |
| bordeaux.country | FR | |
| bordeaux.title.proceeding | Nuclear Instruments and Methods in Physics Research B | |
| bordeaux.conference.city | Paris | |
| bordeaux.peerReviewed | oui | |
| hal.identifier | in2p3-00024484 | |
| hal.version | 1 | |
| hal.conference.end | 2004-09-24 | |
| hal.popular | non | |
| hal.audience | Internationale | |
| hal.origin.link | https://hal.archives-ouvertes.fr//in2p3-00024484v1 | |
| bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.btitle=Nuclear%20Instruments%20and%20Methods%20in%20Physics%20Research%20B&rft.jtitle=Nuclear%20Instruments%20and%20Methods%20in%20Physics%20Research%20Section%20B:%20Beam%20Interactions%20with%20Materials%20and%20Atoms&rft.date=2005&rft.volume=240&rft.spage=265-270&rft.epage=265-270&rft.eissn=0168-583X&rft.issn=0168-583X&rft.au=HIRSCH,%20L.&TARDY,%20P.&WANTZ,%20G.&HUBY,%20N.&MORETTO,%20P.&rft.genre=article |
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