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Low pressure chemical vapour deposition of BN: Relationship between gas phase chemistry and coating microstructure
(Thin Solid Films. vol. 664, pp. 106-114, 2018)Article de revue -
Low pressure chemical vapour deposition of BN: Relationship between gas phase chemistry and coating microstructure
(Thin Solid Films. vol. 664, pp. 106-114, 2018-10-01)Article de revueOpen access