Afficher la notice abrégée

Thermal study of an aluminium nitride ceramic heater for spray CVD on glass substrates by quantitative thermography

hal.structure.identifierCentre d'Etudes et Recherches en Thermique, Environnement et Systèmes [Créteil] [CERTES EA 3481]
dc.contributor.authorRIOU, Olivier
hal.structure.identifierCentre d'Etudes et Recherches en Thermique, Environnement et Systèmes [Créteil] [CERTES EA 3481]
dc.contributor.authorLOGERAIS, Pierre-Olivier
hal.structure.identifierLaboratoire Angevin de Mécanique, Procédés et InnovAtion [LAMPA]
dc.contributor.authorFROGER, Vincent
hal.structure.identifierCentre d'Etudes et Recherches en Thermique, Environnement et Systèmes [Créteil] [CERTES EA 3481]
dc.contributor.authorDURASTANTI, Jean-Félix
hal.structure.identifierLaboratoire Angevin de Mécanique, Procédés et InnovAtion [LAMPA]
dc.contributor.authorBOUTEVILLE, Anne
dc.date.accessioned2021-05-14T09:55:20Z
dc.date.available2021-05-14T09:55:20Z
dc.date.issued2013-05
dc.identifier.issn1768-6733
dc.identifier.urihttps://oskar-bordeaux.fr/handle/20.500.12278/77683
dc.descriptionA thermographic approach is used to determine the temperature of an aluminium nitride hot plate as a glass substrate heater for depositing thin films by spray CVD (Chemical Vapour Deposition). In this context, the temperature of the hot plate is conditioned by the evaluation of both effective emissivity and environment temperature with calibration curve of the commercial camera. We first examined the consistency of the thermosignal/temperature correspondence by employing the software calibration. The environment temperature is evaluated by means of a ruffled aluminium foil according to ASTM. The effective emissivity is measured in situ by using a commercial IR camera on the temperature range of [40°C, 540°C] with a better than 3% accuracy. Absolute value of effective emissivity is in agreement with spectrometric values up to 120°C. Above this temperature, a strong dependence with temperature is highlighted. The radiometric temperature values are thereby corrected with an exactitude of temperature better than 2.5% in Celsius degree for the highest temperatures considered.
dc.description.abstractEnA thermographic approach is used to determine the temperature of an aluminium nitride hot plate as a glass substrate heater for depositing thin films by spray CVD (Chemical Vapour Deposition). In this context, the temperature of the hot plate is conditioned by the evaluation of both effective emissivity and environment temperature with calibration curve of the commercial camera. We first examined the consistency of the thermosignal/temperature correspondence by employing the software calibration. The environment temperature is evaluated by means of a ruffled aluminium foil according to ASTM. The effective emissivity is measured in situ by using a commercial IR camera on the temperature range of [40°C, 540°C] with a better than 3% accuracy. Absolute value of effective emissivity is in agreement with spectrometric values up to 120°C. Above this temperature, a strong dependence with temperature is highlighted. The radiometric temperature values are thereby corrected with an exactitude of temperature better than 2.5% in Celsius degree for the highest temperatures considered.
dc.language.isoen
dc.publisherTaylor and Francis
dc.subject.enhot plate heating
dc.subject.eneffective emissivity
dc.subject.enspectral emissivity
dc.subject.enradiometric temperature correction
dc.subject.enmeasurement uncertainty
dc.title.enThermal study of an aluminium nitride ceramic heater for spray CVD on glass substrates by quantitative thermography
dc.typeArticle de revue
dc.identifier.doi10.1080/17686733.2013.793468
dc.subject.halSciences de l'ingénieur [physics]/Mécanique [physics.med-ph]/Thermique [physics.class-ph]
dc.subject.halSciences de l'ingénieur [physics]/Optique / photonique
bordeaux.journalQuantitative InfraRed Thermography Journal
bordeaux.page159-171
bordeaux.volume10
bordeaux.hal.laboratoriesInstitut de Mécanique et d’Ingénierie de Bordeaux (I2M) - UMR 5295*
bordeaux.issue2
bordeaux.institutionUniversité de Bordeaux
bordeaux.institutionBordeaux INP
bordeaux.institutionCNRS
bordeaux.institutionINRAE
bordeaux.institutionArts et Métiers
bordeaux.peerReviewedoui
hal.identifierhal-01207446
hal.version1
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-01207446v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Quantitative%20InfraRed%20Thermography%20Journal&rft.date=2013-05&rft.volume=10&rft.issue=2&rft.spage=159-171&rft.epage=159-171&rft.eissn=1768-6733&rft.issn=1768-6733&rft.au=RIOU,%20Olivier&LOGERAIS,%20Pierre-Olivier&FROGER,%20Vincent&DURASTANTI,%20Jean-F%C3%A9lix&BOUTEVILLE,%20Anne&rft.genre=article


Fichier(s) constituant ce document

FichiersTailleFormatVue

Il n'y a pas de fichiers associés à ce document.

Ce document figure dans la(les) collection(s) suivante(s)

Afficher la notice abrégée