GAS FLOW IN A NEWTORK OF NANOCHANNELS OF VARYING DEPTH MADE BY GRAYSCALE LASER LITOGRAPHY
| hal.structure.identifier | CEA-Direction des Energies (ex-Direction de l'Energie Nucléaire) [CEA-DES (ex-DEN)] | |
| dc.contributor.author | ZAOUTER, T. | |
| hal.structure.identifier | Institut de Mécanique et d'Ingénierie de Bordeaux [I2M] | |
| dc.contributor.author | LASSEUX, Didier
IDREF: 131294474 | |
| hal.structure.identifier | Institut de mécanique des fluides de Toulouse [IMFT] | |
| dc.contributor.author | PRAT, Marc | |
| dc.contributor.author | LEDRAPPIER, F. | |
| hal.structure.identifier | CEA-Direction des Energies (ex-Direction de l'Energie Nucléaire) [CEA-DES (ex-DEN)] | |
| dc.contributor.author | VULLIEZ, K. | |
| hal.structure.identifier | CEA-Direction des Energies (ex-Direction de l'Energie Nucléaire) [CEA-DES (ex-DEN)] | |
| dc.contributor.author | BEZIAT, A. | |
| hal.structure.identifier | Équipe Micro-Nanofluidique pour les sciences de la vie et de l’environnement [LAAS-MILE] | |
| dc.contributor.author | JOSEPH, Pierre | |
| dc.date.accessioned | 2021-05-14T09:39:59Z | |
| dc.date.available | 2021-05-14T09:39:59Z | |
| dc.date.issued | 2018-03 | |
| dc.date.conference | 2018-02-28 | |
| dc.identifier.uri | https://oskar-bordeaux.fr/handle/20.500.12278/76540 | |
| dc.description.abstractEn | A procedure is given to manufacture glass-silicon network of nanochannels being 10 et956;m in width and 100 to 500 nm in depth. The process is based on grayscale laser lithography to structure a photosensitive polymer resin in a single step. This is followed by a reactive ion etching step to transfer the resist depth profile into silicon. Experimental leak rate measurements are then carried out on the fabricated networks by applying a given pressure at the inlet and near vacuum conditions at the outlet where a mass spectrometer is used for flow-rate measurement. Numerical simulations using a pore-network model are performed by modelling the flow with a family of slip models. Their ability to represent the global leak rate of a heterogeneous network of conductances when near vacuum condition is applied at the outlet is analyzed. | |
| dc.language.iso | en | |
| dc.title.en | GAS FLOW IN A NEWTORK OF NANOCHANNELS OF VARYING DEPTH MADE BY GRAYSCALE LASER LITOGRAPHY | |
| dc.type | Communication dans un congrès avec actes | |
| dc.subject.hal | Physique [physics]/Physique Nucléaire Expérimentale [nucl-ex] | |
| dc.subject.hal | Physique [physics]/Physique Nucléaire Théorique [nucl-th] | |
| bordeaux.hal.laboratories | Institut de Mécanique et d’Ingénierie de Bordeaux (I2M) - UMR 5295 | * |
| bordeaux.institution | Université de Bordeaux | |
| bordeaux.institution | Bordeaux INP | |
| bordeaux.institution | CNRS | |
| bordeaux.institution | INRAE | |
| bordeaux.institution | Arts et Métiers | |
| bordeaux.country | FR | |
| bordeaux.title.proceeding | MicroFluidics and Non-Equilibrium Gas Flows Conference 2018 | |
| bordeaux.conference.city | Strasbourg | |
| bordeaux.peerReviewed | oui | |
| hal.identifier | cea-02339337 | |
| hal.version | 1 | |
| hal.origin.link | https://hal.archives-ouvertes.fr//cea-02339337v1 | |
| bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.date=2018-03&rft.au=ZAOUTER,%20T.&LASSEUX,%20Didier&PRAT,%20Marc&LEDRAPPIER,%20F.&VULLIEZ,%20K.&rft.genre=proceeding |
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