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GAS FLOW IN A NEWTORK OF NANOCHANNELS OF VARYING DEPTH MADE BY GRAYSCALE LASER LITOGRAPHY

hal.structure.identifierCEA-Direction des Energies (ex-Direction de l'Energie Nucléaire) [CEA-DES (ex-DEN)]
dc.contributor.authorZAOUTER, T.
dc.contributor.authorLASSEUX, Didier
IDREF: 131294474
hal.structure.identifierInstitut de mécanique des fluides de Toulouse [IMFT]
dc.contributor.authorPRAT, Marc
dc.contributor.authorLEDRAPPIER, F.
hal.structure.identifierCEA-Direction des Energies (ex-Direction de l'Energie Nucléaire) [CEA-DES (ex-DEN)]
dc.contributor.authorVULLIEZ, K.
hal.structure.identifierCEA-Direction des Energies (ex-Direction de l'Energie Nucléaire) [CEA-DES (ex-DEN)]
dc.contributor.authorBEZIAT, A.
hal.structure.identifierÉquipe Micro-Nanofluidique pour les sciences de la vie et de l’environnement [LAAS-MILE]
dc.contributor.authorJOSEPH, Pierre
dc.date.accessioned2021-05-14T09:39:59Z
dc.date.available2021-05-14T09:39:59Z
dc.date.issued2018-03
dc.date.conference2018-02-28
dc.identifier.urihttps://oskar-bordeaux.fr/handle/20.500.12278/76540
dc.description.abstractEnA procedure is given to manufacture glass-silicon network of nanochannels being 10 et956;m in width and 100 to 500 nm in depth. The process is based on grayscale laser lithography to structure a photosensitive polymer resin in a single step. This is followed by a reactive ion etching step to transfer the resist depth profile into silicon. Experimental leak rate measurements are then carried out on the fabricated networks by applying a given pressure at the inlet and near vacuum conditions at the outlet where a mass spectrometer is used for flow-rate measurement. Numerical simulations using a pore-network model are performed by modelling the flow with a family of slip models. Their ability to represent the global leak rate of a heterogeneous network of conductances when near vacuum condition is applied at the outlet is analyzed.
dc.language.isoen
dc.title.enGAS FLOW IN A NEWTORK OF NANOCHANNELS OF VARYING DEPTH MADE BY GRAYSCALE LASER LITOGRAPHY
dc.typeCommunication dans un congrès avec actes
dc.subject.halPhysique [physics]/Physique Nucléaire Expérimentale [nucl-ex]
dc.subject.halPhysique [physics]/Physique Nucléaire Théorique [nucl-th]
bordeaux.hal.laboratoriesInstitut de Mécanique et d’Ingénierie de Bordeaux (I2M) - UMR 5295*
bordeaux.institutionUniversité de Bordeaux
bordeaux.institutionBordeaux INP
bordeaux.institutionCNRS
bordeaux.institutionINRAE
bordeaux.institutionArts et Métiers
bordeaux.countryFR
bordeaux.title.proceedingMicroFluidics and Non-Equilibrium Gas Flows Conference 2018
bordeaux.conference.cityStrasbourg
bordeaux.peerReviewedoui
hal.identifiercea-02339337
hal.version1
hal.origin.linkhttps://hal.archives-ouvertes.fr//cea-02339337v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.date=2018-03&rft.au=ZAOUTER,%20T.&LASSEUX,%20Didier&PRAT,%20Marc&LEDRAPPIER,%20F.&VULLIEZ,%20K.&rft.genre=proceeding


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