Engineering block copolymer materials for patterning ultra-low dimensions
dc.rights.license | open | en_US |
hal.structure.identifier | Laboratoire de Chimie des Polymères Organiques [LCPO] | |
hal.structure.identifier | Team 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies | |
hal.structure.identifier | Centre de Recherche Paul Pascal [CRPP] | |
dc.contributor.author | CUMMINS, Cian | |
hal.structure.identifier | Laboratoire de Chimie des Polymères Organiques [LCPO] | |
hal.structure.identifier | Team 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies | |
dc.contributor.author | PINO, Guillaume | |
hal.structure.identifier | Laboratoire de Chimie des Polymères Organiques [LCPO] | |
hal.structure.identifier | Team 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies | |
dc.contributor.author | MANTIONE, Daniele | |
hal.structure.identifier | Laboratoire de Chimie des Polymères Organiques [LCPO] | |
hal.structure.identifier | Team 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies | |
dc.contributor.author | FLEURY, Guillaume | |
dc.date.accessioned | 2020-12-01T14:52:10Z | |
dc.date.available | 2020-12-01T14:52:10Z | |
dc.date.issued | 2020-10-28 | |
dc.identifier.uri | oai:crossref.org:10.1039/d0me00118j | |
dc.identifier.uri | https://oskar-bordeaux.fr/handle/20.500.12278/21284 | |
dc.description.abstractEn | Recently engineered high χ-low N block copolymers for nanolithography are evaluated. Synthetic routes together with thin film processing strategies are highlighted that could enable the relentless scaling for logic technologies at sub-10 nanometres. | |
dc.language.iso | EN | en_US |
dc.source | crossref | |
dc.title.en | Engineering block copolymer materials for patterning ultra-low dimensions | |
dc.type | Article de revue | en_US |
dc.identifier.doi | 10.1039/d0me00118j | |
dc.subject.hal | Chimie/Matériaux | |
bordeaux.journal | Molecular Systems Design & Engineering | en_US |
bordeaux.hal.laboratories | Laboratoire de Chimie des Polymères Organiques (LCPO) - UMR5629 | en_US |
bordeaux.institution | Bordeaux INP | en_US |
bordeaux.institution | Université de Bordeaux | en_US |
bordeaux.peerReviewed | oui | en_US |
bordeaux.inpress | non | en_US |
bordeaux.import.source | dissemin | |
hal.identifier | hal-03034199 | |
hal.version | 1 | |
hal.date.transferred | 2020-12-01T15:28:57Z | |
hal.export | true | |
workflow.import.source | dissemin | |
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