Reactive Chemical Vapour Deposition of titanium carbide from H2-TiCl4 gas mixture on pyrocarbon: A comprehensive study
| dc.rights.license | open | en_US |
| hal.structure.identifier | Laboratoire des Composites Thermostructuraux [LCTS] | |
| dc.contributor.author | LEDAIN, Olivier | |
| hal.structure.identifier | Laboratoire des Composites Thermostructuraux [LCTS] | |
| dc.contributor.author | WOELFFEL, Wilfrid | |
| hal.structure.identifier | Laboratoire des Composites Thermostructuraux [LCTS] | |
| dc.contributor.author | ROGER, Jerome | |
| hal.structure.identifier | Laboratoire des Composites Thermostructuraux [LCTS] | |
| dc.contributor.author | VIGNOLES, Gerard
IDREF: 070191875 | |
| hal.structure.identifier | Laboratoire des Composites Thermostructuraux [LCTS] | |
| dc.contributor.author | MAILLE, Laurence | |
| hal.structure.identifier | Laboratoire des Composites Thermostructuraux [LCTS] | |
| dc.contributor.author | JACQUES, Sylvain | |
| dc.date.accessioned | 2023-10-23T12:47:10Z | |
| dc.date.available | 2023-10-23T12:47:10Z | |
| dc.date.issued | 2013 | |
| dc.identifier.issn | 1875-3892 | en_US |
| dc.identifier.uri | https://oskar-bordeaux.fr/handle/20.500.12278/184501 | |
| dc.description.abstractEn | In Reactive Chemical Vapour Deposition (RCVD), the absence of one element of the deposited carbide in the initial gas phase involves the consumption/conversion of the solid substrate. In this way, the growth of a continuous carbide layer on the substrate requires solid-phase diffusion of the reagent. In this work, a parametric study of the RCVD of titanium carbide from pyrocarbon (PyC) and an H2-TiCl4 mixture has been carried out. Conversion ratio, PyC consumption and carbide layer growth kinetics have been determined at 1000°C. The influence of the H2/TiCl 4 dilution ratio has been also investigated. The apparent inter-diffusion coefficient of the carbon through the TiC deposited layer and the direct apparent reaction rate were determined from a comparison between simulations based on a Deal-Grove-type model and the experimental results. The study has been completed with FTIR spectrometry analyses of the gases. | |
| dc.language.iso | EN | en_US |
| dc.rights | Attribution-NonCommercial-NoDerivs 3.0 United States | * |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/us/ | * |
| dc.subject.en | CVD | |
| dc.subject.en | R-CVD | |
| dc.subject.en | TiC coating | |
| dc.subject.en | Pyrocarbon | |
| dc.subject.en | Solid state diffusion | |
| dc.subject.en | FTIR | |
| dc.subject.en | Simulation | |
| dc.title.en | Reactive Chemical Vapour Deposition of titanium carbide from H2-TiCl4 gas mixture on pyrocarbon: A comprehensive study | |
| dc.title.alternative | Phys Procedia | en_US |
| dc.type | Article de revue | en_US |
| dc.identifier.doi | 10.1016/j.phpro.2013.07.048 | en_US |
| dc.subject.hal | Chimie | en_US |
| dc.subject.hal | Chimie/Matériaux | en_US |
| bordeaux.journal | Physics Procedia | en_US |
| bordeaux.page | 79-87 | en_US |
| bordeaux.volume | 46 | en_US |
| bordeaux.hal.laboratories | Laboratoire des Composites Thermo Structuraux (LCTS) - UMR 5801 | en_US |
| bordeaux.institution | Université de Bordeaux | en_US |
| bordeaux.institution | CNRS | en_US |
| bordeaux.institution | CEA | en_US |
| bordeaux.peerReviewed | oui | en_US |
| bordeaux.inpress | non | en_US |
| bordeaux.import.source | hal | |
| hal.identifier | hal-01845084 | |
| hal.version | 1 | |
| hal.popular | non | en_US |
| hal.audience | Internationale | en_US |
| hal.export | false | |
| workflow.import.source | hal | |
| dc.rights.cc | Pas de Licence CC | en_US |
| bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Physics%20Procedia&rft.date=2013&rft.volume=46&rft.spage=79-87&rft.epage=79-87&rft.eissn=1875-3892&rft.issn=1875-3892&rft.au=LEDAIN,%20Olivier&WOELFFEL,%20Wilfrid&ROGER,%20Jerome&VIGNOLES,%20Gerard&MAILLE,%20Laurence&rft.genre=article |
