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Time gating imaging through thick silicon substrate: a new step towards backside characterisation

hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorRAMPNOUX, Jean-Michel
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorMICHEL, H.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorSALHI, M. A.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorGRAUBY, Stéphane
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorCLAEYS, W.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorDILHAIRE, S.
dc.date.issued2006-09
dc.identifier.issn0026-2714
dc.description.abstractEnWe propose in this paper a new backside imaging technique. Due to the constant increase ofnumerous metal layers, active areas can no longer be characterized through the frontside component. Nowadays, the most advanced imaging and failure analysis techniques require a modified backside component to allow probing. We propose a technique, where sample preparations are minimized. An optical time gating is used to reduce artefacts coming from the backside surface.
dc.language.isoen
dc.publisherElsevier
dc.title.enTime gating imaging through thick silicon substrate: a new step towards backside characterisation
dc.typeArticle de revue
dc.identifier.doi10.1016/j.microrel.2006.07.029
dc.subject.halPhysique [physics]
bordeaux.journalMicroelectronics Reliability
bordeaux.page1520-1524
bordeaux.volume46
bordeaux.issue9-11
bordeaux.peerReviewedoui
hal.identifierhal-01552888
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-01552888v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Microelectronics%20Reliability&rft.date=2006-09&rft.volume=46&rft.issue=9-11&rft.spage=1520-1524&rft.epage=1520-1524&rft.eissn=0026-2714&rft.issn=0026-2714&rft.au=RAMPNOUX,%20Jean-Michel&MICHEL,%20H.&SALHI,%20M.%20A.&GRAUBY,%20St%C3%A9phane&CLAEYS,%20W.&rft.genre=article


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