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Laser Scanning Thermomechanical Imaging of Microelectronic Devices
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | GRAUBY, S. | |
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | SALHI, A. | |
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | RAMPNOUX, Jean-Michel | |
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | CLAEYS, W. | |
| hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
| dc.contributor.author | DILHAIRE, S. | |
| dc.date.issued | 2008 | |
| dc.date.conference | 2008-09-24 | |
| dc.description.abstractEn | We present a scanning imaging system using galvanometric mirrors dedicated to the thermomechanical imaging of microelectronic devices. Using a classical He-Ne laser as source, it constitutes a scanning thermoreflectance imaging set-up leading to images of reflectivity relative variations proportional to the device surface temperature variations. Using an heterodyne interferometric probe, it becomes a scanning interferometric set-up leading to surface displacement images. Both thermoreflectance and interferometric images are presented for two samples. | |
| dc.language.iso | en | |
| dc.title.en | Laser Scanning Thermomechanical Imaging of Microelectronic Devices | |
| dc.type | Communication dans un congrès | |
| dc.identifier.doi | 10.1109/THERMINIC.2008.4669905 | |
| dc.subject.hal | Physique [physics] | |
| bordeaux.page | 183-189 | |
| bordeaux.country | IT | |
| bordeaux.conference.city | Rome | |
| bordeaux.peerReviewed | non | |
| hal.identifier | hal-01553682 | |
| hal.version | 1 | |
| hal.invited | non | |
| hal.proceedings | oui | |
| hal.conference.end | 2008-09-26 | |
| hal.popular | non | |
| hal.audience | Internationale | |
| hal.origin.link | https://hal.archives-ouvertes.fr//hal-01553682v1 | |
| bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.date=2008&rft.spage=183-189&rft.epage=183-189&rft.au=GRAUBY,%20S.&SALHI,%20A.&RAMPNOUX,%20Jean-Michel&CLAEYS,%20W.&DILHAIRE,%20S.&rft.genre=unknown |
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