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hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorGRAUBY, Stéphane
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorSALHI, A.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorPATINO LOPEZ, L.D.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorDILHAIRE, S.
hal.structure.identifierTechniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés [TIMA]
dc.contributor.authorCHARLOT, B.
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorCLAEYS, W.
hal.structure.identifierMicro et nanothermique [MN]
dc.contributor.authorCRETIN, B.
hal.structure.identifierMicro et nanothermique [MN]
dc.contributor.authorTESSIER, G.
hal.structure.identifierMicro et nanothermique [MN]
dc.contributor.authorTRANNOY, N.
hal.structure.identifierMicro et nanothermique [MN]
dc.contributor.authorVAIRAC, P.
hal.structure.identifierMicro et nanothermique [MN]
dc.contributor.authorVOLZ, S.
dc.contributor.editorTIMA Editions
dc.date.created2005-09
dc.date.issued2005-09
dc.date.conference2005-09
dc.description.abstractEnWe have studied temperature variations on two dissipative structures with two different techniques. The dissipative structures are constituted of thin (0.35µm) dissipative resistors, the distance between two resistors being equal to 0.8 or 10 µm. On one hand, we have used a thermoreflectance imaging technique which is a well-known non contact optical method to evaluate temperature variations but whose spatial resolution is limited by diffraction. On the other hand, we have used a Scanning Thermal Microscope (SThM) to study the thermal behaviour of these small dissipative structures. We compare qualitative results obtained by both methods and we present their advantages and limitations for temperature measurements on microelectronic devices.
dc.language.isoen
dc.publisherTIMA Editions
dc.subject.enThermal imaging
dc.subject.enspatial resolution
dc.subject.enscanning thermal microscopy
dc.title.enQualitative Temperature Variation Imaging by Thermoreflectance and SThM Techniques
dc.typeCommunication dans un congrès
dc.subject.halInformatique [cs]/Architectures Matérielles [cs.AR]
bordeaux.page284-289
bordeaux.conference.titleTHERMINIC 2005
bordeaux.countryIT
bordeaux.conference.cityBelgirate, Lago Maggiore
bordeaux.peerReviewedoui
hal.identifierhal-00189487
hal.version1
hal.invitednon
hal.proceedingsoui
hal.conference.end2005-09-30
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-00189487v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.date=2005-09&rft.spage=284-289&rft.epage=284-289&rft.au=GRAUBY,%20St%C3%A9phane&SALHI,%20A.&PATINO%20LOPEZ,%20L.D.&DILHAIRE,%20S.&CHARLOT,%20B.&rft.genre=unknown


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