Structural and electrical properties of BaTi1−xZrxO3 sputtered thin films: effect of the sputtering conditions
| hal.structure.identifier | Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB] | |
| dc.contributor.author | REYMOND, Vincent | |
| hal.structure.identifier | Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB] | |
| dc.contributor.author | PAYAN, Sandrine | |
| hal.structure.identifier | Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB] | |
| dc.contributor.author | MICHAU, Dominique | |
| hal.structure.identifier | Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB] | |
| dc.contributor.author | MANAUD, Jean-Pierre | |
| hal.structure.identifier | Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB] | |
| dc.contributor.author | MAGLIONE, Mario | |
| dc.date.issued | 2004 | |
| dc.identifier.issn | 0040-6090 | |
| dc.description.abstractEn | aTi1−xZrxO3 thin films have been prepared on Si and Pt/TiO2/SiO2/Si substrates by radio-frequency magnetron sputtering varying the deposition parameters, such as the chamber pressure, the substrate temperature and the gas composition. The films have been probed by X-ray Diffraction (XRD), Wavelength Dispersive Spectrometry (WDS), Scanning Electron Microscopy (SEM) and Rutherford Backscattering Spectrometry (RBS)... | |
| dc.language.iso | en | |
| dc.publisher | Elsevier | |
| dc.subject.en | Structural properties | |
| dc.subject.en | Thin films | |
| dc.subject.en | BaTi1−xZrxO3 | |
| dc.subject.en | Sputtering | |
| dc.subject.en | Dielectric properties | |
| dc.title.en | Structural and electrical properties of BaTi1−xZrxO3 sputtered thin films: effect of the sputtering conditions | |
| dc.type | Article de revue | |
| dc.identifier.doi | 10.1016/j.tsf.2004.03.005 | |
| dc.subject.hal | Chimie/Matériaux | |
| bordeaux.journal | Thin Solid Films | |
| bordeaux.page | 54-58 | |
| bordeaux.volume | 467 | |
| bordeaux.issue | 1-2 | |
| bordeaux.peerReviewed | oui | |
| hal.identifier | hal-00159589 | |
| hal.version | 1 | |
| hal.popular | non | |
| hal.audience | Internationale | |
| hal.origin.link | https://hal.archives-ouvertes.fr//hal-00159589v1 | |
| bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Thin%20Solid%20Films&rft.date=2004&rft.volume=467&rft.issue=1-2&rft.spage=54-58&rft.epage=54-58&rft.eissn=0040-6090&rft.issn=0040-6090&rft.au=REYMOND,%20Vincent&PAYAN,%20Sandrine&MICHAU,%20Dominique&MANAUD,%20Jean-Pierre&MAGLIONE,%20Mario&rft.genre=article |
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