VICTOR, Jean-Louis; MARCEL, Corinne; SAUQUES, Laurent; LABRUGÈRE, Christine; AMIARD, Frederic; GIBAUD, Alain; ROUGIER, Aline

doi:10.1016/j.jallcom.2020.157658

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VICTOR, Jean-Louis
CEA Le Ripault [CEA Le Ripault]
Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB]

MARCEL, Corinne
CEA Le Ripault [CEA Le Ripault]

SAUQUES, Laurent
Centre d'expertise et d'essais Paris-Balard [Délégation Générale pour l'Armement (DGA)]

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Journal of Alloys and Compounds. 2021, vol. 858, p. 157658 (7 p.)

Elsevier

Résumé en anglais

W-doped monoclinic vanadium dioxide VO2(M) thin films with various W contents were successfully deposited by magnetron sputtering method. As-deposited films consisted of multilayers composed of VO2/W bilayers. Further annealing at 500 °C under Argon for 1 h led to crystallized and homogeneous V1-xWxO2±δ films. 200 nm films were characterized at room temperature by Rutherford backscattering spectrometry (RBS), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). Besides, the films were analyzed by temperature-dependent infrared transmittance in the wavelength region 2–25 μm and the effects of W doping on thermochromic properties of VO2 were studied. The results show that the transition temperature gradually decreases with increasing W content. A transition temperature of 21 °C with a high infrared transmittance modulation (≈68%) was finally achieved with a W-doping level of 2.7 at.% which may indicate a strong potential for applications in optical devices as functional materials.< Réduire

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Magnetron sputtering

multilayers

vanadium dioxide

W doping

thermochromic behavior

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From multilayers to V1-xWxO2±δ films elaborated by magnetron sputtering for decreasing thermochromic transition temperature

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