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Supercritical fluid deposition of compositionally uniform yttria stabilized zirconia films

hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
hal.structure.identifierPolymer Science and Engineering Department
dc.contributor.authorLE TREQUESSER, Quentin
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
hal.structure.identifierPolymer Science and Engineering Department
dc.contributor.authorMESGUICH, David
hal.structure.identifierPolymer Science and Engineering Department
hal.structure.identifierChemical Engineering Department
dc.contributor.authorYOU, Eunyoung
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorAYMONIER, Cyril
hal.structure.identifierPolymer Science and Engineering Department
dc.contributor.authorWATKINS, James J.
dc.date.issued2012
dc.identifier.issn0896-8446
dc.description.abstractEnWe report the formation of yttriastabilizedzirconia (YSZ) thin films by supercriticalfluiddeposition (SFD) in carbon dioxide at 20 MPa and a stage temperature of 300 °C via hydrolysis of zirconium(IV) hexafluoroacetylacetonate and yttrium(III) hexafluoroacetylacetonate. Post-deposition annealing of the films at 800 °C yields crystalline films having the expected fluorite structure as evidenced by X-ray diffraction. Such films are suitable for the fabrication of electrolyte thin films for micro-solid oxide fuel cells (μ-SOFC). We show that a cyclic co-deposition process in which aliquots of precursor are introduced sequentially enables the depostion of YSZ thin films with uniform composition as evidenced by X-ray photoelectron spectroscopy. In each cycle, the mixed precursor solution in CO2 is introduced to the reactor and then purged following a short reaction interval. By contrast, simple batch SFD processes that employ hydrolysis of the mixed precursors introduced at the onset of the depositions lead to non-uniform distributions of the cations throughout the thickness of the films. The cyclic deposition approach extends supercriticalfluiddeposition to materials such as multi-cations oxides for which precise control of stoichiometry is required.
dc.language.isoen
dc.publisherElsevier
dc.typeArticle de revue
dc.identifier.doi10.1016/j.supflu.2011.11.018
dc.subject.halChimie/Matériaux
bordeaux.journalJournal of Supercritical Fluids
bordeaux.page328-332
bordeaux.volume66
bordeaux.peerReviewedoui
hal.identifierhal-00700326
hal.version1
hal.popularnon
hal.audienceInternationale
dc.subject.itSupercritical fluid deposition
dc.subject.itCarbon dioxide
dc.subject.itYttria stabilized zirconia thin films
dc.subject.itMicro-SOFC
dc.subject.itCyclic deposition
dc.title.itSupercritical fluid deposition of compositionally uniform yttria stabilized zirconia films
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-00700326v1
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