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A New Approach in the Field of Hydrogen Gas Sensing Using MEMS Based 3C-SiC Microcantilevers
| dc.rights.license | open | en_US |
| hal.structure.identifier | GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN] | |
| dc.contributor.author | SHANMUGAM, Priyadarshini | |
| hal.structure.identifier | Laboratoire de l'intégration, du matériau au système [IMS] | |
| dc.contributor.author | IGLESIAS, Luis | |
| hal.structure.identifier | Centre de recherche sur l'hétéroepitaxie et ses applications [CRHEA] | |
| dc.contributor.author | PORTAIL, Marc | |
| hal.structure.identifier | Laboratoire de l'intégration, du matériau au système [IMS] | |
| dc.contributor.author | DUFOUR, Isabelle
IDREF: 069722633 | |
| hal.structure.identifier | GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN] | |
| dc.contributor.author | CERTON, Dominique | |
| hal.structure.identifier | GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN] | |
| dc.contributor.author | ALQUIER, Daniel | |
| hal.structure.identifier | GREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN] | |
| dc.contributor.author | MICHAUD, Jean François | |
| dc.date.accessioned | 2022-08-29T12:28:12Z | |
| dc.date.available | 2022-08-29T12:28:12Z | |
| dc.date.issued | 2022-05-31 | |
| dc.date.conference | 2021-10-24 | |
| dc.identifier.uri | https://oskar-bordeaux.fr/handle/20.500.12278/140610 | |
| dc.description.abstractEn | This paper demonstrates the ability of 3CSiC microcantilevers (μCs) to monitor binary gas mixture without sensitive coating. Here, 3CSiC is chosen in particular, as the newly designed sensor will be placed in a radioactive environment. The change in gas concentration is identified using relative shifts in the cantilever’s mechanical resonance frequency (∆ f r ). The presented microcantilevers work on electromagnetic actuation and inductive detection. In this paper, the fabrication process, optical characterization results using laser Doppler vibrometry and test results under a gas mixture environment are demonstrated. The presented limit of detection shows the ability of 3CSiCμCs to detect less than 1% of hydrogen in nitrogen, which makes them suitable for the targeted application. | |
| dc.language.iso | EN | en_US |
| dc.subject.en | Silicon carbide | |
| dc.subject.en | 3C-SiC microcantilevers | |
| dc.subject.en | physical gas detector | |
| dc.subject.en | hydrogen sensor | |
| dc.subject.en | MEMS | |
| dc.subject.en | electromagnetic actuation and inductive detection | |
| dc.title.en | A New Approach in the Field of Hydrogen Gas Sensing Using MEMS Based 3C-SiC Microcantilevers | |
| dc.type | Communication dans un congrès avec actes | en_US |
| dc.identifier.doi | 10.4028/p-m048qs | en_US |
| dc.subject.hal | Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique | en_US |
| bordeaux.page | 593-597 | en_US |
| bordeaux.volume | 1062 | en_US |
| bordeaux.hal.laboratories | Laboratoire d’Intégration du Matériau au Système (IMS) - UMR 5218 | en_US |
| bordeaux.institution | Université de Bordeaux | en_US |
| bordeaux.institution | Bordeaux INP | en_US |
| bordeaux.institution | CNRS | en_US |
| bordeaux.conference.title | ECSCRM 2020·2021 | en_US |
| bordeaux.country | fr | en_US |
| bordeaux.title.proceeding | 13th European Conference on Silicon Carbide and Related Materials | en_US |
| bordeaux.conference.city | Tours | en_US |
| bordeaux.peerReviewed | oui | en_US |
| bordeaux.import.source | hal | |
| hal.identifier | hal-03708472 | |
| hal.version | 1 | |
| hal.export | true | |
| workflow.import.source | hal | |
| dc.rights.cc | Pas de Licence CC | en_US |
| bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.date=2022-05-31&rft.volume=1062&rft.spage=593-597&rft.epage=593-597&rft.au=SHANMUGAM,%20Priyadarshini&IGLESIAS,%20Luis&PORTAIL,%20Marc&DUFOUR,%20Isabelle&CERTON,%20Dominique&rft.genre=proceeding |
