Browsing Laboratoire des Composites Thermo Structuraux (LCTS) - UMR 5801 by Author "COSSOU, Benjamin"
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Synthesis and optimization of low-pressure chemical vapor deposition-silicon nitride coatings deposited from SiHCl3 and NH3
COSSOU, Benjamin; JACQUES, Sylvain; COUEGNAT, Guillaume ...(Thin Solid Films. vol. 681, pp. 47-57, 2019-07-01)Article de revueOpen access