Browsing Laboratoire des Composites Thermo Structuraux (LCTS) - UMR 5801 by Author "LANFORD, W. A."
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Synthesis and optimization of low-pressure chemical vapor deposition-silicon nitride coatings deposited from SiHCl3 and NH3
COSSOU, Benjamin; JACQUES, Sylvain; COUEGNAT, Guillaume ...(Thin Solid Films. vol. 681, pp. 47-57, 2019-07-01)Article de revueOpen access -
Synthesis and optimization of low-pressure chemical vapor deposition-silicon nitride coatings deposited from SiHCl 3 and NH 3
COSSOU, B.; JACQUES, Sylvain; COUÉGNAT, G. ...(Thin Solid Films. vol. 681, pp. 47-57, 2019)Article de revue