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Optimization of block copolymer self-assembly through graphoepitaxy: A defectivity study

dc.rights.licenseopen
hal.structure.identifierCommissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information [CEA-LETI]
dc.contributor.authorTIRON, Raluca
hal.structure.identifierCommissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information [CEA-LETI]
dc.contributor.authorCHEVALIER, Xavier
hal.structure.identifierCommissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information [CEA-LETI]
dc.contributor.authorCOUDERC, Christophe
hal.structure.identifierCommissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information [CEA-LETI]
dc.contributor.authorPRADELLES, Jonathan
hal.structure.identifierCommissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information [CEA-LETI]
dc.contributor.authorBUSTOS, Jessy
hal.structure.identifierCommissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information [CEA-LETI]
dc.contributor.authorPAIN, Laurent
hal.structure.identifierGroupement de recherches de Lacq [GRL]
dc.contributor.authorNAVARRO, Christophe
hal.structure.identifierGroupement de recherches de Lacq [GRL]
dc.contributor.authorMAGNET, Stéphanie
hal.structure.identifierLaboratoire de Chimie des Polymères Organiques [LCPO]
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorFLEURY, Guillaume
hal.structure.identifierLaboratoire de Chimie des Polymères Organiques [LCPO]
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorHADZIIOANNOU, Georges
dc.date.accessioned2020
dc.date.available2020
dc.date.issued2011
dc.identifier.urihttps://oskar-bordeaux.fr/handle/20.500.12278/20351
dc.description.abstractEnIn this paper we report a synoptic methodology to evaluate and optimize the long-range order induced by graphoepitaxy of block copolymer (BCP) self-assembly. The authors focus the study on a BCP that produces hexagonally packed arrays of cylinders oriented perpendicular to the substrate with the copolymer film thickness greater than the trench depth. Prepatterned structures used in the graphoepitaxy approach have been generated by e-beam lithography on a commercial hydrogen silesquioxane resist. A suitable surface modification was accomplished by grafting a random polystyrene-r-poly(methyl methacrylate) copolymer on the prepatterned surfaces. The polystyrene-b-poly(methyl methacrylate) was spin-coated and annealed in order to generate the desired self-assembly. Since the self-assembly process is based on a thermodynamic mechanism, the induced defectivity needs to be reassessed with respect to the standard lithographic process. Using the cylinder center coordinates, a Delaunay triangulation is performed to find the nearest neighbors. This triangulation enables us to easily locate the disclinations which are characterized by having a number of nearest neighbors different from six. Thus, the number of defects can be quantified precisely. Additionally, this methodology affords an accurate evaluation of both the optimum mesa and trench critical dimensions yielding defect-free surfaces and may be extended to monitor the robustness of the BCP directed self-assembly process. Such diagnostics are critical in the implementation of large scale industrial processes.
dc.language.isoen
dc.subject.enTEMPLATES
dc.subject.enALIGNMENT
dc.subject.enDEVICE-ORIENTED STRUCTURES
dc.subject.enTHIN-FILMS
dc.subject.enDIBLOCK COPOLYMER
dc.subject.enORIENTATIONAL ORDER
dc.subject.enCONFINEMENT
dc.subject.enPATTERNS
dc.subject.enBLENDS
dc.subject.enARRAYS
dc.title.enOptimization of block copolymer self-assembly through graphoepitaxy: A defectivity study
dc.typeArticle de revue
dc.identifier.doi10.1116/1.3659714
dc.subject.halChimie/Polymères
bordeaux.journalJournal of Vacuum Science and Technology B
bordeaux.pageArt Nb: 06F206
bordeaux.volume29
bordeaux.hal.laboratoriesLaboratoire de Chimie des Polymères Organiques (LCPO) - UMR 5629*
bordeaux.issue6
bordeaux.institutionBordeaux INP
bordeaux.institutionUniversité de Bordeaux
bordeaux.peerReviewedoui
hal.identifierhal-00951472
hal.version1
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-00951472v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Journal%20of%20Vacuum%20Science%20and%20Technology%20B&rft.date=2011&rft.volume=29&rft.issue=6&rft.spage=Art%20Nb:%2006F206&rft.epage=Art%20Nb:%2006F206&rft.au=TIRON,%20Raluca&CHEVALIER,%20Xavier&COUDERC,%20Christophe&PRADELLES,%20Jonathan&BUSTOS,%20Jessy&rft.genre=article


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