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Rapid Self-Assembly and Sequential Infiltration Synthesis of High χ Fluorine-Containing Block Copolymers

dc.rights.licenseopen
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorCUMMINS, Cian
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorMANTIONE, Daniele
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorCRUCIANI, Federico
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorPINO, Guillaume
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorDEMAZY, Nils
hal.structure.identifierDepartment of Mechanical Engineering [Montréal]
dc.contributor.authorSHI, Yulin
hal.structure.identifierEuropean Synchrotron Radiation Facility [ESRF]
dc.contributor.authorPORTALE, Giuseppe
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorHADZIIOANNOU, Georges
hal.structure.identifierTeam 4 LCPO : Polymer Materials for Electronic, Energy, Information and Communication Technologies
dc.contributor.authorFLEURY, Guillaume
dc.date2020
dc.date.accessioned2020
dc.date.available2020
dc.date.issued2020
dc.identifier.issn0024-9297
dc.identifier.urihttps://oskar-bordeaux.fr/handle/20.500.12278/19628
dc.description.abstractEnWe leverage the attractive properties of a high χ-low N BCP, i.e. poly(styrene)-block-poly(2-fluoro ethyl methylacrylate) (PS-b-P2FEMA) and illustrate its utility for next-generation nano-manufacturing. The synthesis, physical characterization and thin film self-assembly of a series of lamellar and cylindrical PS-b-P2FEMA BCPs is delineated. PS-b-P2FEMA BCPs with total molecular weights ranging from 7 kg mol -1 to 22 kg mol -1 were synthesized using reversible-addition-fragmentation chain-transfer (RAFT) polymerization. Temperature resolved small angle X-ray scattering (SAXS) measurements revealed a large χ value (0.13@ 150°C) for PS-b-P2FEMA. Solvo-thermal vapor annealing of PS-b-P2FEMA films produced highly oriented fingerprint patterns in as short as 60 seconds. Lamellar period sizes ranged from 25.9 nm down to 14.2 nm with feature sizes as small as 7 nm observed. We also demonstrate the integration feasibility of PS-b-P2FEMA BCPs through alumina hardmask formation using sequential infiltration synthesis. The highly favorable characteristics of the P2FEMA based BCPs detailed here provide a versatile material option to the current library of available BCPs for sub-10 nm nanolithography.
dc.language.isoen
dc.publisherAmerican Chemical Society
dc.subject.enFluoro block copolymers
dc.subject.ennanolithography
dc.subject.ensub-10 nm patterning
dc.subject.ensequential infiltration synthesis
dc.subject.enmetal oxide nanofeatures
dc.title.enRapid Self-Assembly and Sequential Infiltration Synthesis of High χ Fluorine-Containing Block Copolymers
dc.typeArticle de revue
dc.identifier.doi10.1021/acs.macromol.0c01148
dc.subject.halChimie/Polymères
bordeaux.journalMacromolecules
bordeaux.hal.laboratoriesLaboratoire de Chimie des Polymères Organiques (LCPO) - UMR 5629*
bordeaux.institutionBordeaux INP
bordeaux.institutionUniversité de Bordeaux
bordeaux.peerReviewedoui
hal.identifierhal-02903486
hal.version1
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-02903486v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Macromolecules&rft.date=2020&rft.eissn=0024-9297&rft.issn=0024-9297&rft.au=CUMMINS,%20Cian&MANTIONE,%20Daniele&CRUCIANI,%20Federico&PINO,%20Guillaume&DEMAZY,%20Nils&rft.genre=article


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