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A Simple Process for the Fabrication of Parallel-Plate Electrostatic MEMS Resonators by Gold Thermocompression Bonding

dc.rights.licenseopenen_US
hal.structure.identifierLaboratoire d'analyse et d'architecture des systèmes [LAAS]
dc.contributor.authorJUAREZ, Dolores Manrique
hal.structure.identifierLaboratoire d'analyse et d'architecture des systèmes [LAAS]
dc.contributor.authorMATHIEU, Fabrice
hal.structure.identifierLaboratoire d'analyse et d'architecture des systèmes [LAAS]
dc.contributor.authorLIBAUDE, Guillaume
hal.structure.identifierLaboratoire d'analyse et d'architecture des systèmes [LAAS]
dc.contributor.authorBOURRIER, David
hal.structure.identifierLaboratoire d'analyse et d'architecture des systèmes [LAAS]
dc.contributor.authorCHARLOT, Samuel
hal.structure.identifierLaboratoire d'analyse et d'architecture des systèmes [LAAS]
dc.contributor.authorMAZENQ, Laurent
hal.structure.identifierLaboratoire d'analyse et d'architecture des systèmes [LAAS]
dc.contributor.authorCONEDERA, Veronique
hal.structure.identifierLaboratoire d'analyse et d'architecture des systèmes [LAAS]
dc.contributor.authorSALVAGNAC, Ludovic
hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
dc.contributor.authorDUFOUR, Isabelle
IDREF: 069722633
hal.structure.identifierLaboratoire d'analyse et d'architecture des systèmes [LAAS]
dc.contributor.authorNICU, Liviu
hal.structure.identifierLaboratoire d'analyse et d'architecture des systèmes [LAAS]
hal.structure.identifierSchool of Electrical and Computer Engineering - Georgia Insitute of Technology [ECE GeorgiaTech]
hal.structure.identifierGeorgia Institute of Technology [Atlanta]
dc.contributor.authorLEICHLE, Thierry
dc.date.accessioned2023-11-28T10:33:10Z
dc.date.available2023-11-28T10:33:10Z
dc.date.issued2023-03-01
dc.date.conference2023-01-15
dc.identifier.issn2473-2001en_US
dc.identifier.urioai:crossref.org:10.1109/mems49605.2023.10052563
dc.identifier.urihttps://oskar-bordeaux.fr/handle/20.500.12278/186196
dc.description.abstractThe present work introduces a simple and quick process for the fabrication of flexural MEMS resonators with electrostatic actuation and capacitive detection. Gold thermocompression is used to anchor the free-standing structure, to provide electrical connections and to seal the chip to protect the structure to be released during wet etching, in a single step. The additional advantage of this process is the ability to simply adjust the gap of the parallel-plate capacitor through the thickness of electroplated gold. Squeeze damping is reduced by fabricating devices with increasing gaps.
dc.language.isoENen_US
dc.publisherIEEEen_US
dc.sourcecrossref
dc.subjectMicromechanical devices
dc.subjectFabrication
dc.subjectDamping
dc.subjectGold
dc.subjectWet etching
dc.subjectSilicon carbide
dc.subjectResonators
dc.subjectdamping Electroplating
dc.subjectElectrostatic actuators
dc.subjectEtching
dc.subjectGold
dc.subjectLead bonding
dc.subjectMicromechanical devices
dc.subjectMicromechanical resonators
dc.subjectCapacitors
dc.subjectMicromechanical device
dc.subjectCantilever
dc.subjectParallel-plate capacitor
dc.subjectResonant frequency
dc.subjectQ-factor
dc.subjectPackaging
dc.subjectThermocompression
dc.title.enA Simple Process for the Fabrication of Parallel-Plate Electrostatic MEMS Resonators by Gold Thermocompression Bonding
dc.typeActes de congrès/Proceedingsen_US
dc.identifier.doi10.1109/mems49605.2023.10052563en_US
dc.subject.halSciences de l'ingénieur [physics]en_US
bordeaux.institutionUniversité de Bordeauxen_US
bordeaux.institutionBordeaux INPen_US
bordeaux.institutionCNRSen_US
bordeaux.conference.title2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)en_US
bordeaux.countrydeen_US
bordeaux.teamORGANICS ELECTRONICS-PRIMSen_US
bordeaux.conference.cityMunichen_US
bordeaux.inpressnonen_US
bordeaux.identifier.funderIDAgence Nationale pour la Gestion des Déchets Radioactifsen_US
bordeaux.import.sourcedissemin
hal.conference.end2023-01-19
hal.popularnonen_US
hal.audienceInternationaleen_US
hal.exportfalse
workflow.import.sourcedissemin
dc.rights.ccPas de Licence CCen_US
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.date=2023-03-01&rft.eissn=2473-2001&rft.issn=2473-2001&rft.au=JUAREZ,%20Dolores%20Manrique&MATHIEU,%20Fabrice&LIBAUDE,%20Guillaume&BOURRIER,%20David&CHARLOT,%20Samuel&rft.genre=unknown


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