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High-Frequency Linear Array (20 MHz) based on Lead-Free BCTZ Crystal

hal.structure.identifierVermon S.A.
dc.contributor.authorBANTIGNIES, Claire
hal.structure.identifierGREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
dc.contributor.authorROUFFAUD, R.
hal.structure.identifierInstitute for Advanced Environmental Research
dc.contributor.authorBUSE, Gabriel
hal.structure.identifieriLM - Luminescence [iLM - LUMINESCENCE]
dc.contributor.authorVEBER, P.
hal.structure.identifierCristalInnov
dc.contributor.authorCABANE, Hugues
hal.structure.identifierThales Research and Technology [Palaiseau]
dc.contributor.authorBORTA-BOYON, Ana
hal.structure.identifierThales Research and Technology [Palaiseau]
dc.contributor.authorPHAM THI, Mai
hal.structure.identifierVermon S.A.
dc.contributor.authorMAUCHAMP, Pascal
hal.structure.identifierVermon S.A.
dc.contributor.authorLEJEUNE, A.
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorMAGLIONE, Mario
hal.structure.identifierGREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
dc.contributor.authorCOLIN, Laurent
hal.structure.identifierGREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
dc.contributor.authorBALÉ, Antoine
hal.structure.identifierVermon S.A.
dc.contributor.authorFLESCH, Martin
hal.structure.identifierGREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
dc.contributor.authorLEVASSORT, F.
dc.date.issued2024
dc.identifier.issn0885-3010
dc.description.abstractEnCentimeter-sized BaTiO 3 -based crystals grown by top-seeded solution growth from the BaTiO 3 –CaTiO 3 –BaZrO 3 system were used to process a high-frequency (HF) lead-free linear array. Piezoelectric plates with (110)pc cut within 1° accuracy were used to manufacture two 1-3 piezo-composites with thicknesses of 270 and 78 μm for resonant frequencies in air of 10 and 30 MHz, respectively. The electromechanical characterization of the BCTZ crystal plates and the 10 MHz piezocomposite yielded thickness coupling factors of 40% and 50%, respectively. We quantified the electromechanical performance of the second piezocomposite (30 MHz) according to the reduction in the pillar sizes during the fabrication process. The dimensions of the piezocomposite at 30 MHz were sufficient for a 128-element array with a 70 μm element pitch and a 1.5 mm elevation aperture. The transducer stack (backing, matching layers, lens and electrical components) was tuned with the characteristics of the lead-free materials to deliver optimal bandwidth and sensitivity. The probe was connected to a real-time HF 128-channel echographic system for acoustic characterization (electroacoustic response, radiation pattern) and to acquire high-resolution in vivo images of human skin. The center frequency of the experimental probe was 20 MHz, and the fractional bandwidth at -6 dB was 41%. Skin images were compared against those obtained with a lead-based 20-MHz commercial imaging probe. Despite significant differences in sensitivity between elements, in vivo images obtained with a BCTZ-based probe convincingly demonstrated the potential of integrating this piezoelectric material in an imaging probe.
dc.description.sponsorshipMatériaux piézoélectriques alternatifs haute performance : vers des solutions respectueuses de l'environnement - ANR-14-CE07-0028
dc.language.isoen
dc.publisherInstitute of Electrical and Electronics Engineers
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/
dc.title.enHigh-Frequency Linear Array (20 MHz) based on Lead-Free BCTZ Crystal
dc.typeArticle de revue
dc.identifier.doi10.1109/TUFFC.2023.3278034
dc.subject.halChimie/Matériaux
dc.subject.halSciences de l'ingénieur [physics]/Acoustique [physics.class-ph]
dc.subject.halSciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
bordeaux.journalIEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
bordeaux.page27-37
bordeaux.volume71
bordeaux.issue1
bordeaux.peerReviewedoui
hal.identifierhal-04136397
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-04136397v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=IEEE%20Transactions%20on%20Ultrasonics,%20Ferroelectrics%20and%20Frequency%20Control&rft.date=2024&rft.volume=71&rft.issue=1&rft.spage=27-37&rft.epage=27-37&rft.eissn=0885-3010&rft.issn=0885-3010&rft.au=BANTIGNIES,%20Claire&ROUFFAUD,%20R.&BUSE,%20Gabriel&VEBER,%20P.&CABANE,%20Hugues&rft.genre=article


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