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dc.rights.licenseopenen_US
hal.structure.identifierInstitut Interdisciplinaire d'Innovation Technologique [Sherbrooke] [3IT]
hal.structure.identifierLaboratoire Nanotechnologies et Nanosystèmes [Sherbrooke] [LN2]
dc.contributor.authorVANDIER, Quentin
hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
dc.contributor.authorFREMONT, Helene
IDREF: 127007571
hal.structure.identifierInstitut Interdisciplinaire d'Innovation Technologique [Sherbrooke] [3IT]
hal.structure.identifierLaboratoire Nanotechnologies et Nanosystèmes [Sherbrooke] [LN2]
dc.contributor.authorDROUIN, Dominique
dc.date.accessioned2023-04-25T07:10:37Z
dc.date.available2023-04-25T07:10:37Z
dc.date.issued2022-11
dc.identifier.issn2156-3950en_US
dc.identifier.urioai:crossref.org:10.1109/tcpmt.2022.3226139
dc.identifier.urihttps://oskar-bordeaux.fr/handle/20.500.12278/173185
dc.description.abstractMoisture diffusion into the back-end-of-line (BEOL) can be critical for the reliability of electronic devices. With the objective of studying moisture diffusion into critical areas, such as the silicon–organic substrate interfaces of a flip chip plastic ball grid array (FC-PBGA), a multitude of impedance sensors sensitive to moisture are integrated inside the BEOL of a 17×17 mm silicon die. The sensors are read by a dedicated custom circuit that allows accurate characterization of the moisture with in situ spatial measurements. This article presents the results obtained by the experimental acquisition system on the FC-PBGA module under a high-relative humidity (RH) level of up to 75%. This study shows the moisture behavior of the multiwalled carbon nanotube (MWCNT) sensors inside the BEOL during absorption and desorption. The behavior initially follows Fick’s law, with a constant increase in the RH. For long-term tests of more than 400 h, an asymptotic behavior is observed; when the concentration of a sensor reaches a value close to saturation, a two-dimensional finite-difference method (2D FDM) is used to estimate the saturation value. Thanks to the large number of sensors distributed on the BEOL, we first detect, during an absorption test, an increase in the RH. This increase is due, first of all, to a lateral moisture front with a constant velocity of about 90 μm /h moving through the underfill. Then, after 30 h of storage, a more complex diffusion through the organic substrate occurs, affecting the BEOL.
dc.language.isoENen_US
dc.rightsAttribution 3.0 United States*
dc.rights.urihttp://creativecommons.org/licenses/by/3.0/us/*
dc.sourcecrossref
dc.subjectSensors
dc.subjectMoisture
dc.subjectFlip-chip devices
dc.subjectHumidity
dc.subjectMoisture measurement
dc.subjectCarbon nanotubes
dc.subjectRelative humidity sensors
dc.subjectFC-PBGA
dc.subjectMoisture diffusion
dc.subjectLong-term high-humidity storage
dc.subjectAbsorption
dc.subjectBall grid arrays
dc.subjectDesorption
dc.subjectFinite difference methods
dc.subjectFlip-chip devices
dc.subjectMulti-wall carbon nanotubes
dc.subjectNanosensors
dc.subjectFlip chip plastic ball grid array (FC-PBGA)
dc.subjectLong-term high-humidity storage
dc.subjectMoisture diffusion
dc.subjectRelative humidity (RH) sensors
dc.title.enMoisture Diffusion Inside the BEOL of an FC-PBGA Package
dc.typeArticle de revueen_US
dc.identifier.doi10.1109/tcpmt.2022.3226139en_US
dc.subject.halSciences de l'ingénieur [physics]en_US
bordeaux.journalIEEE Transactions on Components, Packaging and Manufacturing Technologyen_US
bordeaux.page1740-1747en_US
bordeaux.volume12en_US
bordeaux.hal.laboratoriesIMS : Laboratoire de l'Intégration du Matériau au Système - UMR 5218en_US
bordeaux.issue11en_US
bordeaux.institutionUniversité de Bordeauxen_US
bordeaux.institutionBordeaux INPen_US
bordeaux.institutionCNRSen_US
bordeaux.teamFIABILITE-PACEen_US
bordeaux.peerReviewedouien_US
bordeaux.inpressnonen_US
bordeaux.import.sourcedissemin
hal.identifierhal-03885127
hal.version1
hal.date.transferred2023-04-25T07:10:40Z
hal.exporttrue
workflow.import.sourcedissemin
dc.rights.ccCC BYen_US
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=IEEE%20Transactions%20on%20Components,%20Packaging%20and%20Manufacturing%20Technology&rft.date=2022-11&rft.volume=12&rft.issue=11&rft.spage=1740-1747&rft.epage=1740-1747&rft.eissn=2156-3950&rft.issn=2156-3950&rft.au=VANDIER,%20Quentin&FREMONT,%20Helene&DROUIN,%20Dominique&rft.genre=article


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