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Dynamic characterization of SiO2-Au microcantilevers using Michelson interferometer
dc.contributor.author | MARINIER, G. | |
hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
dc.contributor.author | DILHAIRE, Stefan | |
hal.structure.identifier | Centre de physique moléculaire optique et hertzienne [CPMOH] | |
dc.contributor.author | LOPEZ, L. D. P. | |
dc.contributor.author | BENZOHRA, M. | |
dc.contributor.editor | Chiao | |
dc.contributor.editor | J. C. and Varadan | |
dc.contributor.editor | V. K. and Cane | |
dc.contributor.editor | C. | |
dc.date.issued | 2003 | |
dc.identifier.isbn | 0-8194-4976-8 | |
dc.language.iso | en | |
dc.source.title | Smart Sensors, Actuators, and Mems, Pts 1 and 2 | |
dc.title.en | Dynamic characterization of SiO2-Au microcantilevers using Michelson interferometer | |
dc.type | Chapitre d'ouvrage | |
dc.identifier.doi | 10.1117/12.498827 | |
dc.subject.hal | Physique [physics] | |
bordeaux.page | 406-413 | |
bordeaux.volume | 5116 | |
bordeaux.title.proceeding | Smart Sensors, Actuators, and Mems, Pts 1 and 2 | |
hal.identifier | hal-01840912 | |
hal.version | 1 | |
hal.popular | non | |
hal.audience | Internationale | |
hal.origin.link | https://hal.archives-ouvertes.fr//hal-01840912v1 | |
bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.btitle=Smart%20Sensors,%20Actuators,%20and%20Mems,%20Pts%201%20and%202&rft.date=2003&rft.volume=5116&rft.spage=406-413&rft.epage=406-413&rft.au=MARINIER,%20G.&DILHAIRE,%20Stefan&LOPEZ,%20L.%20D.%20P.&BENZOHRA,%20M.&rft.isbn=0-8194-4976-8&rft.genre=unknown |
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