Monitoring tantalum nitride thin film structure by reactive RF magnetron sputtering: Influence of processing parameters
| hal.structure.identifier | Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB] | |
| dc.contributor.author | CHEVIOT, Maureen | |
| hal.structure.identifier | Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB] | |
| dc.contributor.author | GOUNÉ, Mohamed | |
| hal.structure.identifier | Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB] | |
| dc.contributor.author | POULON-QUINTIN, Angeline | |
| dc.date.issued | 2015 | |
| dc.identifier.issn | 0257-8972 | |
| dc.description.abstractEn | Tantalum nitride thin films were deposited onto WC-6%Co substrates using reactive RF magnetron sputtering. Their structure and microstructure were studied and analyzed according to processing parameters. It has been demonstrated that the weight ratio of hexagonal TaN (h-TaN) to face centered cubic TaN (fcc-TaN) strongly depends on adatoms mobility on the substrate surface. In particular, growth conditions promoting adatoms mobility, i.e. low N2 partial pressure, total gas pressure, target-to-substrate distance as well as high target power density, promote the formation of h-TaN structure. Both exclusively fcc-TaN and exclusively h-TaN films were synthesized. A possible mechanism for the stabilization of those structures is discussed. | |
| dc.language.iso | en | |
| dc.publisher | Elsevier | |
| dc.subject.en | Tantalum nitride | |
| dc.subject.en | Thin film | |
| dc.subject.en | Reactive sputtering | |
| dc.subject.en | Structure control | |
| dc.subject.en | Quenching | |
| dc.title.en | Monitoring tantalum nitride thin film structure by reactive RF magnetron sputtering: Influence of processing parameters | |
| dc.type | Article de revue | |
| dc.identifier.doi | 10.1016/j.surfcoat.2015.08.075 | |
| dc.subject.hal | Chimie/Matériaux | |
| bordeaux.journal | Surface and Coatings Technology | |
| bordeaux.page | 192–197 | |
| bordeaux.volume | 284 | |
| bordeaux.peerReviewed | oui | |
| hal.identifier | hal-01247674 | |
| hal.version | 1 | |
| hal.popular | non | |
| hal.audience | Internationale | |
| hal.origin.link | https://hal.archives-ouvertes.fr//hal-01247674v1 | |
| bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Surface%20and%20Coatings%20Technology&rft.date=2015&rft.volume=284&rft.spage=192%E2%80%93197&rft.epage=192%E2%80%93197&rft.eissn=0257-8972&rft.issn=0257-8972&rft.au=CHEVIOT,%20Maureen&GOUN%C3%89,%20Mohamed&POULON-QUINTIN,%20Angeline&rft.genre=article |
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