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Composition dependence of ionic conductivity in LiSiPO(N) thin-film electrolytes for solid-state batteries

hal.structure.identifierCommissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information [CEA-LETI]
hal.structure.identifierInstitute of Materials Science, Materials Design by Synthesis
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorFAMPRIKIS, Theodosios
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorGALIPAUD, Jules
hal.structure.identifierInstitute of Materials Science, Materials Design by Synthesis
hal.structure.identifierInstitute of Nanotechology
dc.contributor.authorCLEMENS, Oliver
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorPECQUENARD, Brigitte
hal.structure.identifierCommissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information [CEA-LETI]
dc.contributor.authorLE CRAS, Frédéric
dc.date.issued2019-06-14
dc.identifier.issn2574-0962
dc.description.abstractEnThe current commercial standard thin film electrolyte LiPON is the limiting factor for the further development of microbatteries due to its low Li+ ionic conductivity (2 × 10–6 S/cm). In order to produce more conductive electrolytes and elucidate the synthesis–properties interrelation for this system, we sputtered thin films from single-phase ceramic targets of composition Li3+xSixP1–xO4 under Ar and N2 atmospheres. The amorphous thin films produced under Ar (LiSiPO) are more conducting than the crystalline target materials (amorphization effect). Furthermore, the fact that the resulting amorphous films contain both phosphate and silicate building units (mixed-former effect) increases the conductivity to approximately the values of LiPON (10–6 S/cm). Reactive sputtering under N2 leads to oxynitride (LiSiPON) thin films with a maximum Li+ ionic conductivity of 2.06 × 10–5 S/cm (Ea = 0.45 eV), about 1 order of magnitude higher than LiPON, in accordance with previous works. These results are discussed in the context of available literature in order to elucidate the effect of Si:P and Li:(Si + P) compositional ratios on ionic conductivity. Finally, we expose a target-dependent effect of nonstoichiometric, Li-deficient depositions that is a current impediment to sputtering of highly Li+-conductive targets.
dc.language.isoen
dc.publisherACS
dc.subject.enLiPON
dc.subject.enLiSiPON
dc.subject.enThin-film electrolyte
dc.subject.enMicrobattery
dc.subject.enRF-sputtering
dc.subject.enLithium
dc.subject.enHigh conductivity
dc.title.enComposition dependence of ionic conductivity in LiSiPO(N) thin-film electrolytes for solid-state batteries
dc.typeArticle de revue
dc.identifier.doi10.1021/acsaem.9b00415
dc.subject.halChimie/Matériaux
bordeaux.journalACS Applied Energy Materials
bordeaux.page4782-4791
bordeaux.volume2
bordeaux.issue7
bordeaux.peerReviewedoui
hal.identifierhal-02294325
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-02294325v1
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