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Anodic bonding of mid-infrared transparent germanate glasses for high pressure - high temperature microfluidic applications

hal.structure.identifierInstitut des Sciences Chimiques de Rennes [ISCR]
hal.structure.identifierUniversité Laval [Québec] [ULaval]
dc.contributor.authorARI, Julien
hal.structure.identifierInstitut des Sciences Chimiques de Rennes [ISCR]
hal.structure.identifierUniversité Laval [Québec] [ULaval]
dc.contributor.authorLOUVET, Geoffrey
hal.structure.identifierUniversité Laval [Québec] [ULaval]
dc.contributor.authorLEDEMI, Yannick
hal.structure.identifierInstitut de Physique de Rennes [IPR]
dc.contributor.authorCÉLARIÉ, Fabrice
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorMORAIS, Sandy
hal.structure.identifierInstitut des Sciences Chimiques de Rennes [ISCR]
dc.contributor.authorBUREAU, Bruno
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorMARRE, Samuel
hal.structure.identifierInstitut des Sciences Chimiques de Rennes [ISCR]
dc.contributor.authorNAZABAL, Virginie
hal.structure.identifierUniversité Laval [Québec] [ULaval]
dc.contributor.authorMESSADDEQ, Younès
dc.date.issued2020-01-01
dc.identifier.issn1468-6996
dc.description.abstractEnHigh pressure/high-temperature microreactors based on silicon-Pyrex® microfabrication technologies have attracted increasing interest in various applications providing optical access in high-pressure flow processes. However, they cannot be coupled to infrared spectroscopy due to the limited optical transparency (up to ~2.7 μm in the infrared region) of the Pyrex® glass substrate employed in the microreactor fabrication. To address this limitation, the alternative approach proposed in this work consists in replacing the Pyrex® glass in the microreactor by a mid-infrared transparent glass with thermal and mechanical properties as close as possible or even better to those of the Pyrex®, including its ability for silicon-wafers coupling by the anodic bonding process. Glasses based on germanate GeO2, known for their excellent transmission in the mid-infrared range and thermal/thermo-mechanical properties, have been thus evaluated and developed for this purpose. The optical, mechanical, thermal and electrical conductivity properties of adapted glass compositions belonging to five vitreous systems have been systemically investigated. The glass composition 70GeO2-15Al2O3-10La2O3-5Na2O (mol.%) was defined as the best candidate and produced in large plates of 50 mm diameter and 1 mm thickness. Anodic bonding tests with Si-wafers have been then successfully conducted, paving the way for the development of fully mid-infrared transparent silicon-glass microreactors.
dc.description.sponsorshipMicro-laboratoires géologiques sur puce pour l'étude des processus clés du transport réactif multiphasique appliqués au stockage géologique du CO2. - ANR-12-SEED-0001
dc.language.isoen
dc.publisherNational Institute for Materials Science
dc.rights.urihttp://creativecommons.org/licenses/by/
dc.subject.enGermanate glass
dc.subject.enmid-infrared
dc.subject.enanodic bonding
dc.subject.enhigh pressure/high temperature
dc.subject.enmicrofluidics
dc.subject.enmid- infrared
dc.title.enAnodic bonding of mid-infrared transparent germanate glasses for high pressure - high temperature microfluidic applications
dc.typeArticle de revue
dc.identifier.doi10.1080/14686996.2019.1702861
dc.subject.halChimie/Matériaux
dc.subject.halPhysique [physics]
bordeaux.journalScience and Technology of Advanced Materials
bordeaux.page11-24
bordeaux.volume21
bordeaux.issue1
bordeaux.peerReviewedoui
hal.identifierhal-02467111
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-02467111v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Science%20and%20Technology%20of%20Advanced%20Materials&rft.date=2020-01-01&rft.volume=21&rft.issue=1&rft.spage=11-24&rft.epage=11-24&rft.eissn=1468-6996&rft.issn=1468-6996&rft.au=ARI,%20Julien&LOUVET,%20Geoffrey&LEDEMI,%20Yannick&C%C3%89LARI%C3%89,%20Fabrice&MORAIS,%20Sandy&rft.genre=article


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