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Nitrogen flow rate as a new key parameter for the nitridation of electrolyte thin films

hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorHAMON, Yohann
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorVINATIER, Philippe
hal.structure.identifierTheoretical and Physical Chemistry Institute
dc.contributor.authorKAMITSOS, Efstratios I.
hal.structure.identifierTheoretical and Physical Chemistry Institute
dc.contributor.authorDUSSAUZE, Marc
hal.structure.identifierTheoretical and Physical Chemistry Institute
dc.contributor.authorVARSAMIS, Christos-Platon E.
hal.structure.identifierFachbereich Chemie
dc.contributor.authorZIELNIOK, D.
hal.structure.identifierFachbereich Chemie
dc.contributor.authorROESSER, C.
dc.contributor.authorROLING, C.
dc.date.issued2008
dc.identifier.issn0167-2738
dc.description.abstractEnThis work presents an investigation of the role of the nitrogen flow rate on the composition, structure and ionic conductivity of thin films prepared by reactive radio-frequency (rf) sputtering of lithium metaborate targets. It was found that sputtering at constant nitrogen pressure but with increasing nitrogen flow rate leads to thin films with significantly increased nitrogen content. The effect of nitridation on the borate network has been studied by infrared transmittance spectroscopy and revealed boron–nitrogen bonding in triangular arrangements of the glass network, followed by a parallel destruction of borate tetrahedral units. The ionic conductivity of thin films was also measured and found to increase with the nitrogen amount in the film.
dc.language.isoen
dc.publisherElsevier
dc.subject.enNitridation
dc.subject.enReactive sputtering
dc.subject.enSolid electrolyte
dc.subject.enBorate glasses
dc.title.enNitrogen flow rate as a new key parameter for the nitridation of electrolyte thin films
dc.typeArticle de revue
dc.identifier.doi10.1016/j.ssi.2008.04.005
dc.subject.halChimie/Matériaux
bordeaux.journalSolid State Ionics
bordeaux.page1223-1226
bordeaux.volume179
bordeaux.issue21-26
bordeaux.peerReviewedoui
hal.identifierhal-00333154
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-00333154v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Solid%20State%20Ionics&rft.date=2008&rft.volume=179&rft.issue=21-26&rft.spage=1223-1226&rft.epage=1223-1226&rft.eissn=0167-2738&rft.issn=0167-2738&rft.au=HAMON,%20Yohann&VINATIER,%20Philippe&KAMITSOS,%20Efstratios%20I.&DUSSAUZE,%20Marc&VARSAMIS,%20Christos-Platon%20E.&rft.genre=article


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