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Tunability investigation in the BaTiO3-CaTiO3-BaZrO3 phase diagram using a refined combinatorial thin film approach

hal.structure.identifierGREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
dc.contributor.authorDAUMONT, Christophe
hal.structure.identifierGREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorSIMON, Quentin
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorPAYAN, Sandrine
hal.structure.identifierSTMicroelectronics
dc.contributor.authorGARDES, Pascal
hal.structure.identifierSTMicroelectronics
dc.contributor.authorPOVEDA, Patrick
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorMAGLIONE, Mario
hal.structure.identifierGREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
dc.contributor.authorNEGULESCU, Béatrice
hal.structure.identifierGREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
dc.contributor.authorJABER, Nazir
hal.structure.identifierGREMAN (matériaux, microélectronique, acoustique et nanotechnologies) [GREMAN]
dc.contributor.authorWOLFMAN, Jérôme
dc.date.issued2021
dc.identifier.issn2079-6412
dc.description.abstractEnTunable ferroelectric capacitors, which exhibit a decrease in the dielectric permittivity under an electric field, are widely used in electronics for RF tunable applications. Current devices use barium strontium titanate (BST) as the tunable dielectric, but new applications call for tunable materials with specific performance improvements. It is then of crucial importance to dispose of a large panel of electrically characterized materials to identify the most suited compound for a given set of device specifications. Here, we report on the dielectric tuning properties of Ba1−xCaxTi1−yZryO3 (BCTZ) thin films libraries (0 ≤ x ≤ 30% and 0 ≤ y ≤ 28.5%) synthesized by combinatorial pulsed laser deposition (CPLD). An original CPLD approach allowing reliable and statistical ternary phase diagrams exploration is reported. The effects of Ca and Zr content on tunability, breakdown voltage and dielectric losses are explicated and shown to be beneficial up to a certain amount. Compounds close to (Ba0.84Ca0.16)(Ti0.8Zr0.2)O3 exhibit the highest figures of merit, while a zone with compositions around (Ba0.91Ca0.09)(Ti0.81Zr0.19)O3 show the best compromise between tuning ratio and figure of merit. These results highlight the potential of BCTZ thin films for electrically tunable applications.
dc.language.isoen
dc.publisherMDPI
dc.subject.enBCTZ
dc.subject.enthin films
dc.subject.endielectric
dc.subject.entunable capacitors
dc.subject.enPLD
dc.subject.enlead-free relaxor
dc.title.enTunability investigation in the BaTiO3-CaTiO3-BaZrO3 phase diagram using a refined combinatorial thin film approach
dc.typeArticle de revue
dc.identifier.doi10.3390/coatings11091082
dc.subject.halChimie/Matériaux
bordeaux.journalCoatings
bordeaux.page1082
bordeaux.volume11
bordeaux.issue9
bordeaux.peerReviewedoui
hal.identifierhal-03391541
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-03391541v1
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