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hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorFLEUTOT, Benoit
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorPECQUENARD, Brigitte
hal.structure.identifierInstitut pluridisciplinaire de recherche sur l'environnement et les matériaux [IPREM]
dc.contributor.authorMARTINEZ, Hervé
hal.structure.identifierAdvanced Technologies R&D
dc.contributor.authorLETELLIER, M.
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorLEVASSEUR, Alain
dc.date.issued2011
dc.identifier.issn0167-2738
dc.description.abstractEnAmorphous thin solid films of lithium phosphorus oxynitride (LiPON) were prepared by radio-frequency sputtering from a Li<sub>3</sub>PO<sub>4</sub> target by varying nitrogen flow rate. The aim of this study is to establish the correlations between deposition conditions, composition, local structure and the electrical properties of the electrolyte (ionic conductivity and activation energy). As expected, ionic conductivity of LiPON thin films increases with nitrogen flow rate reaching a maximum of 3.10<sup>−6</sup> S cm<sup>−1</sup> while the activation energy reaches a minimum of 0.57 eV. The use of three complementary techniques, X-ray photoelectron spectroscopy, Raman spectroscopy and Nuclear Magnetic Resonance has allowed a thorough investigation of the local structure of the LiPON thin films. The formation of phosphorus-nitrogen bonds in place of phosphorus-oxygen bonds involves two kinds of nitrogen atoms (N1: a nitrogen atom linked to two phosphorus atoms (-N=), and N2: a nitrogen atom linked to three phosphorus atoms (-N<). The substitution of oxygen by nitrogen induces a decrease of the bridging oxygen/non-bridging oxygen ratio. This modification of the local structure favours lithium-ion mobility at the origin of the conductivity improvement.
dc.language.isoen
dc.publisherElsevier
dc.subject.enThin film
dc.subject.enLiPON
dc.subject.enXPS
dc.subject.enNitridation
dc.subject.enLithium microbatteries
dc.subject.enSolid electrolyte
dc.title.enInvestigation of the local structure of LiPON thin films to better understand the role of nitrogen on their performance
dc.typeArticle de revue
dc.identifier.doi10.1016/j.ssi.2011.01.006
dc.subject.halChimie/Matériaux
bordeaux.journalSolid State Ionics
bordeaux.page29-36
bordeaux.volume186
bordeaux.issue1
bordeaux.peerReviewedoui
hal.identifierhal-00589375
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-00589375v1
bordeaux.COinSctx_ver=Z39.88-2004&amp;rft_val_fmt=info:ofi/fmt:kev:mtx:journal&amp;rft.jtitle=Solid%20State%20Ionics&amp;rft.date=2011&amp;rft.volume=186&amp;rft.issue=1&amp;rft.spage=29-36&amp;rft.epage=29-36&amp;rft.eissn=0167-2738&amp;rft.issn=0167-2738&amp;rft.au=FLEUTOT,%20Benoit&amp;PECQUENARD,%20Brigitte&amp;MARTINEZ,%20Herv%C3%A9&amp;LETELLIER,%20M.&amp;LEVASSEUR,%20Alain&amp;rft.genre=article


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