Experimental and theoretical investigation of BCl_3 decomposition in H_2
| dc.rights.license | open | en_US |
| hal.structure.identifier | Laboratoire des Composites Thermostructuraux [LCTS] | |
| dc.contributor.author | REINISCH, Guillaume | |
| hal.structure.identifier | Laboratoire des Composites Thermostructuraux [LCTS] | |
| dc.contributor.author | LEYSSALE, Jean-Marc | |
| hal.structure.identifier | Laboratoire des Composites Thermostructuraux [LCTS] | |
| dc.contributor.author | BERTRAND, Nathalie | |
| hal.structure.identifier | Laboratoire des Composites Thermostructuraux [LCTS] | |
| dc.contributor.author | CHOLLON, Georges | |
| hal.structure.identifier | Laboratoire des Composites Thermostructuraux [LCTS] | |
| dc.contributor.author | LANGLAIS, Francis | |
| hal.structure.identifier | Laboratoire des Composites Thermostructuraux [LCTS] | |
| dc.contributor.author | VIGNOLES, Gerard
IDREF: 070191875 | |
| dc.date.accessioned | 2023-10-25T12:52:46Z | |
| dc.date.available | 2023-10-25T12:52:46Z | |
| dc.date.issued | 2008-12-25 | |
| dc.identifier.issn | 0257-8972 | en_US |
| dc.identifier.uri | https://oskar-bordeaux.fr/handle/20.500.12278/184537 | |
| dc.description.abstractEn | A combined experimental and theoretical study of the homogeneous decomposition of BCl3 in a H2 carrier gas is presented. A detailed description of the B/Cl/H thermodynamic equilibrium is first obtained from ab-initio calculations from which a restricted low energy chemical mechanism is identified to model the decomposition of BCl3. Transition state theory is then invoked to obtain reaction rates and the resulting kinetic mechanism is incorporated in a 1D model of a CVD reactor. Comparison of calculated steady state concentrations with in-situ FT-IR measurements shows a good agreement at low temperatures, thus validating the kinetic model. The divergence observed at higher temperatures is attributed to boron deposition. | |
| dc.language.iso | EN | en_US |
| dc.subject.en | Chemical Kinetics | |
| dc.subject.en | Ab-initio computation | |
| dc.subject.en | Boron Carbide | |
| dc.subject.en | Boron | |
| dc.subject.en | Chemical Vapor Deposition | |
| dc.title.en | Experimental and theoretical investigation of BCl_3 decomposition in H_2 | |
| dc.title.alternative | Surf Coat Technol | en_US |
| dc.type | Article de revue | en_US |
| dc.identifier.doi | 10.1016/j.surfcoat.2008.04.086 | en_US |
| dc.subject.hal | Chimie/Matériaux | en_US |
| dc.subject.hal | Chimie/Chemo-informatique | en_US |
| dc.subject.hal | Sciences de l'ingénieur [physics]/Génie des procédés | en_US |
| bordeaux.journal | Surface and Coatings Technology | en_US |
| bordeaux.page | 643-647 | en_US |
| bordeaux.volume | 203 | en_US |
| bordeaux.hal.laboratories | Laboratoire des Composites Thermo Structuraux (LCTS) - UMR 5801 | en_US |
| bordeaux.issue | 5-7 | en_US |
| bordeaux.institution | Université de Bordeaux | en_US |
| bordeaux.institution | CNRS | en_US |
| bordeaux.institution | CEA | en_US |
| bordeaux.peerReviewed | oui | en_US |
| bordeaux.inpress | non | en_US |
| bordeaux.identifier.funderID | Safran Aircraft Engines | en_US |
| bordeaux.import.source | hal | |
| hal.identifier | hal-00410189 | |
| hal.version | 1 | |
| hal.popular | non | en_US |
| hal.audience | Internationale | en_US |
| hal.export | false | |
| workflow.import.source | hal | |
| dc.rights.cc | Pas de Licence CC | en_US |
| bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Surface%20and%20Coatings%20Technology&rft.date=2008-12-25&rft.volume=203&rft.issue=5-7&rft.spage=643-647&rft.epage=643-647&rft.eissn=0257-8972&rft.issn=0257-8972&rft.au=REINISCH,%20Guillaume&LEYSSALE,%20Jean-Marc&BERTRAND,%20Nathalie&CHOLLON,%20Georges&LANGLAIS,%20Francis&rft.genre=article |
