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One step densification of printed multilayers by SPS : towards new piezoelectric energy harvester MEMS

hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
dc.contributor.authorDEBÉDA, Hélène
hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
dc.contributor.authorRUA TABORDA, Maria Isabel
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorCHUNG SEU, U-Chan
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorELISSALDE, Catherine
dc.contributor.editorCao Giacomo
dc.contributor.editorEstournès Claude
dc.contributor.editorGaray Javier
dc.contributor.editorOrrù Roberto
dc.date.issued2019
dc.identifier.isbn978-0-12-817744-0
dc.description.abstractEnAutonomous electronic devices and increasing use of wireless sensors, which are more and more effective, are facing the problem of energy autonomy. This autonomy can be achieved with preliminary storage and/or energy harvesting. Hence, for 20 years, the energy harvesting research field has intensively focused on the development of new materials and their integration in micro/nanogenerators. In this research area, Micro-Electromechanical System (MEMS) energy harvesters (EH) using piezoelectric materials is one of the most promising options, because of the availability of mechanical vibrations and of the simplicity of electromechanical conversion. Piezoelectric ceramics, commonly used in various applications, are attractive for EH, and among them, Pb(Zr1-xTix)O3 (PZT), despite its lead content, remains mostly studied because of its outstanding properties. For its ceramic process, the main objectives are improved densification, cost and energy efficient processing, and integration in microgenerators. In this context, SPS sintering of printed electrode PZT piezoelectric layers supported on stainless steel substrate (SS) is highly challenging. In this chapter, after a section devoted to piezoelectric EH, the device made of screen-printed PZT layers on SS substrate is presented. Then, the authors focus on the strategy to achieve, in one step, a cantilever transducer where the printed electrode PZT and the SS substrate are co-sintered by SPS. As a first part of this ambitious objective, microstructural, dielectric, and piezoelectric properties of the PZT pellet densified by SPS are presented and compared to PZT printed layers conventionally sintered.
dc.language.isoen
dc.publisherElsevier
dc.publisher.locationAmsterdam
dc.source.titleSpark Plasma Sintering : Current status, new developments and challenges
dc.subject.enscreen-printed
dc.subject.enmultilayer
dc.subject.enenergy harvesting
dc.subject.enpiezoelectric
dc.subject.enmetal-ceramic assembly
dc.subject.eninterfaces
dc.title.enOne step densification of printed multilayers by SPS : towards new piezoelectric energy harvester MEMS
dc.typeChapitre d'ouvrage
dc.identifier.doi10.1016/B978-0-12-817744-0.00010-6
dc.subject.halChimie/Matériaux
bordeaux.page219-255
bordeaux.title.proceedingSpark Plasma Sintering : Current status, new developments and challenges
hal.identifierhal-02133411
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-02133411v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.btitle=Spark%20Plasma%20Sintering%20:%20Current%20status,%20new%20developments%20and%20challenges&rft.date=2019&rft.spage=219-255&rft.epage=219-255&rft.au=DEB%C3%89DA,%20H%C3%A9l%C3%A8ne&RUA%20TABORDA,%20Maria%20Isabel&CHUNG%20SEU,%20U-Chan&ELISSALDE,%20Catherine&rft.isbn=978-0-12-817744-0&rft.genre=unknown


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