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hal.structure.identifierDepartment of Electrical and Computer Engineering
dc.contributor.authorFAN, Lisha
hal.structure.identifierDepartment of Electrical and Computer Engineering
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorCONSTANTIN, Loic
hal.structure.identifierDepartment of Electrical and Computer Engineering
dc.contributor.authorWU, Zhipeng
hal.structure.identifierDepartment od Chemistry
dc.contributor.authorMCELVEEN, Kayleigh A.
hal.structure.identifierDepartment of Physics and Astronomy
dc.contributor.authorCHEN, Xiu G.
hal.structure.identifierdepartment of Civil and Environmental Engineering
dc.contributor.authorHE, Tingchao
hal.structure.identifierDepartment of Mechanical and Materials Engineering
dc.contributor.authorWANG, Fei
hal.structure.identifierLaboratoire Interfaces et Systèmes Electrochimiques [LISE]
dc.contributor.authorDEBIEMME, Catherine
hal.structure.identifierDepartment of Mechanical and Materials Engineering
dc.contributor.authorCUI, Bai
hal.structure.identifierDepartment od Chemistry
dc.contributor.authorLAI, Rebecca Y.
hal.structure.identifierdepartment of Civil and Environmental Engineering
dc.contributor.authorLI, Xu
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorSILVAIN, Jean-François
hal.structure.identifierDepartment of Electrical and Computer Engineering
dc.contributor.authorLU, Yongfeng
dc.date.issued2021-01-20
dc.identifier.issn2375-2548
dc.description.abstractEnPursuing high-level doping without deteriorating crystallinity is prohibitively difficult but scientifically crucial to unleashing the hidden power of materials. This study demonstrates an effective route for maintaining lattice integrity during the combustion chemical vapor deposition of highly conductive boron-doped diamonds (BDDs) through laser vibrational excitation of a growth-critical radical, boron dihydride (BH2). The improved diamond crystallinity is attributed to a laser-enabled, thermal nonequilibrium suppression of the relative abundance of boron hydrides (BH), whose excessive presence induces boron segregation and disturbs the crystallization. The BDDs show a boron concentration of 4.3 × 1021 cm−3, a film resistivity of 28.1 milliohm·cm, and hole mobility of 55.6 cm2 V−1 s−1, outperforming a commercial BDD. The highly conductive and crystalline BDDs exhibit enhanced efficiency in sensing glucose, confirming the advantages of laser excitation in producing high-performance BDD sensors. Regaining crystallinity with laser excitation in doping process could remove the long-standing bottlenecks in semiconductor industry.
dc.language.isoen
dc.publisherAmerican Association for the Advancement of Science (AAAS)
dc.rights.urihttp://creativecommons.org/licenses/by-nc/
dc.subject.enLaser vibrational
dc.subject.enboron
dc.subject.endiamond
dc.subject.encristallinity
dc.title.enLaser vibrational excitation of radicals to prevent crystallinity degradation caused by boron doping in diamond
dc.typeArticle de revue
dc.identifier.doi10.1126/sciadv.abc7547
dc.subject.halChimie
dc.subject.halChimie/Matériaux
bordeaux.journalScience Advances
bordeaux.pageeabc7547
bordeaux.volume7
bordeaux.issue4
bordeaux.peerReviewedoui
hal.identifierhal-03120211
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-03120211v1
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