Printed PZT Thick Films Implemented for Functionalized Gas Sensors
hal.structure.identifier | Laboratoire de l'intégration, du matériau au système [IMS] | |
dc.contributor.author | RUA-TABORDA, Maria Isabel | |
hal.structure.identifier | Laboratoire de l'intégration, du matériau au système [IMS] | |
dc.contributor.author | SANTAWITEE, Onuma | |
hal.structure.identifier | Chulalongkorn University [Bangkok] | |
dc.contributor.author | PHONGPHUT, Angkana | |
hal.structure.identifier | National Metals and Materials Technology Center | |
dc.contributor.author | CHAYASOMBAT, Bralee | |
hal.structure.identifier | National Metals and Materials Technology Center | |
dc.contributor.author | THANACHAYANONT, Chanchana | |
hal.structure.identifier | Chulalongkorn University [Bangkok] | |
dc.contributor.author | PRICHANONT, Seeroong | |
hal.structure.identifier | Institut de Chimie de la Matière Condensée de Bordeaux [ICMCB] | |
dc.contributor.author | ELISSALDE, Catherine | |
hal.structure.identifier | Laboratoire Universitaire des Sciences Appliquées de Cherbourg [LUSAC] | |
dc.contributor.author | BERNARD, Jérome | |
hal.structure.identifier | Laboratoire de l'intégration, du matériau au système [IMS] | |
dc.contributor.author | DEBÉDA, Hélène | |
dc.date.issued | 2018-08 | |
dc.identifier.issn | 1013-9826 | |
dc.description.abstractEn | Attractive for MEMS, PZT thick films are often microstructured on Si supporting platforms to span the gap between ceramics and thin film technologies. Printing process might lead to lower cost than ceramic process to open routes for MEMS applications. In this paper processing by screen-printing of Au/PZT/Au thick-films supported on alumina or completely released from the substrate are described. Investigations of the film microstructures nevertheless show lower densification than those of bulk ceramics. Prior to selective coating deposition, routes to improve the reduction of the film’s porosity are proposed. | |
dc.language.iso | en | |
dc.publisher | Trans Tech Publications | |
dc.title.en | Printed PZT Thick Films Implemented for Functionalized Gas Sensors | |
dc.type | Article de revue | |
dc.identifier.doi | 10.4028/www.scientific.net/KEM.777.158 | |
dc.subject.hal | Sciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique | |
dc.subject.hal | Sciences de l'ingénieur [physics] | |
bordeaux.journal | Key Engineering Materials | |
bordeaux.page | 158-162 | |
bordeaux.volume | 777 | |
bordeaux.peerReviewed | oui | |
hal.identifier | hal-01911808 | |
hal.version | 1 | |
hal.popular | non | |
hal.audience | Internationale | |
hal.origin.link | https://hal.archives-ouvertes.fr//hal-01911808v1 | |
bordeaux.COinS | ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Key%20Engineering%20Materials&rft.date=2018-08&rft.volume=777&rft.spage=158-162&rft.epage=158-162&rft.eissn=1013-9826&rft.issn=1013-9826&rft.au=RUA-TABORDA,%20Maria%20Isabel&SANTAWITEE,%20Onuma&PHONGPHUT,%20Angkana&CHAYASOMBAT,%20Bralee&THANACHAYANONT,%20Chanchana&rft.genre=article |
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