Mostrar el registro sencillo del ítem

Printed PZT Thick Films Implemented for Functionalized Gas Sensors

hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
dc.contributor.authorRUA-TABORDA, Maria Isabel
hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
dc.contributor.authorSANTAWITEE, Onuma
hal.structure.identifierChulalongkorn University [Bangkok]
dc.contributor.authorPHONGPHUT, Angkana
hal.structure.identifierNational Metals and Materials Technology Center
dc.contributor.authorCHAYASOMBAT, Bralee
hal.structure.identifierNational Metals and Materials Technology Center
dc.contributor.authorTHANACHAYANONT, Chanchana
hal.structure.identifierChulalongkorn University [Bangkok]
dc.contributor.authorPRICHANONT, Seeroong
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorELISSALDE, Catherine
hal.structure.identifierLaboratoire Universitaire des Sciences Appliquées de Cherbourg [LUSAC]
dc.contributor.authorBERNARD, Jérome
hal.structure.identifierLaboratoire de l'intégration, du matériau au système [IMS]
dc.contributor.authorDEBÉDA, Hélène
dc.date.issued2018-08
dc.identifier.issn1013-9826
dc.description.abstractEnAttractive for MEMS, PZT thick films are often microstructured on Si supporting platforms to span the gap between ceramics and thin film technologies. Printing process might lead to lower cost than ceramic process to open routes for MEMS applications. In this paper processing by screen-printing of Au/PZT/Au thick-films supported on alumina or completely released from the substrate are described. Investigations of the film microstructures nevertheless show lower densification than those of bulk ceramics. Prior to selective coating deposition, routes to improve the reduction of the film’s porosity are proposed.
dc.language.isoen
dc.publisherTrans Tech Publications
dc.title.enPrinted PZT Thick Films Implemented for Functionalized Gas Sensors
dc.typeArticle de revue
dc.identifier.doi10.4028/www.scientific.net/KEM.777.158
dc.subject.halSciences de l'ingénieur [physics]/Micro et nanotechnologies/Microélectronique
dc.subject.halSciences de l'ingénieur [physics]
bordeaux.journalKey Engineering Materials
bordeaux.page158-162
bordeaux.volume777
bordeaux.peerReviewedoui
hal.identifierhal-01911808
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-01911808v1
bordeaux.COinSctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.jtitle=Key%20Engineering%20Materials&rft.date=2018-08&rft.volume=777&rft.spage=158-162&rft.epage=158-162&rft.eissn=1013-9826&rft.issn=1013-9826&rft.au=RUA-TABORDA,%20Maria%20Isabel&SANTAWITEE,%20Onuma&PHONGPHUT,%20Angkana&CHAYASOMBAT,%20Bralee&THANACHAYANONT,%20Chanchana&rft.genre=article


Archivos en el ítem

ArchivosTamañoFormatoVer

No hay archivos asociados a este ítem.

Este ítem aparece en la(s) siguiente(s) colección(ones)

Mostrar el registro sencillo del ítem