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Effects of laser photolysis of hydrocarbons at 193 and 248 nm on chemical vapor deposition of diamond films

hal.structure.identifierDepartment of Electrical Engineering
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorCONSTANTIN, Loic
hal.structure.identifierDepartment of Electrical Engineering
dc.contributor.authorFAN, Lisha
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
hal.structure.identifierDepartment of Electrical Engineering
dc.contributor.authorAZINA, Clio
hal.structure.identifierDepartment of Electrical Engineering
dc.contributor.authorKERAMATNEJAD, Kamran
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
hal.structure.identifierDepartment of Electrical Engineering
dc.contributor.authorSILVAIN, Jean-François
hal.structure.identifierDepartment of Electrical Engineering
dc.contributor.authorLU, Yong Feng
dc.date.issued2018
dc.identifier.issn1528-7483
dc.description.abstractEnIn this work, the influence of ultraviolet (UV) laser photolysis of hydrocarbons on combustion chemical vapor deposition of diamond films was investigated at 193 and 248 nm. Although the output fluence of the 193 nm laser was 1 order of magnitude lower than that of the 248 nm laser, UV laser irradiations at 193 and 248 nm led to similar enhancement of diamond growth: a 2-fold increase in the diamond deposition rate and a 3% increase in diamond quality compared to those obtained without laser irradiation. In situ thermionic measurement of emission currents revealed that the diamond nucleation time was reduced from 9.5 min without laser irradiation to 4.2 and 7.0 min, respectively, with UV laser irradiations at 193 and 248 nm. These results suggest the advantages of using UV laser photolysis in diamond deposition achieved by suppressing nondiamond carbon accumulation. Spectroscopic investigation of the flame chemistry showed that UV laser irradiations of the diamond-forming combustion flames led to photogenerated reactive species, OH, CH, and C2, which play critical roles in diamond growth. The more pronounced flame chemistry change and diamond growth enhancement with UV laser irradiation at 193 nm than 248 nm is attributed to a higher photon energy, 6.4 eV, which is above the energetic dissociation threshold of most hydrocarbons for more efficient photodissociation.
dc.language.isoen
dc.publisherAmerican Chemical Society
dc.subject.enphotolysis
dc.subject.enultraviolet laser
dc.subject.endiamond
dc.subject.encombustion
dc.subject.enchemical vapor deposition
dc.title.enEffects of laser photolysis of hydrocarbons at 193 and 248 nm on chemical vapor deposition of diamond films
dc.typeArticle de revue
dc.identifier.doi10.1021/acs.cgd.8b00084
dc.subject.halChimie/Matériaux
bordeaux.journalCrystal Growth & Design
bordeaux.page2458-2466
bordeaux.volume18
bordeaux.issue4
bordeaux.peerReviewedoui
hal.identifierhal-01787015
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-01787015v1
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