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Beat the diffraction limit in 3D direct laser writing in photosensitive glass

hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorBELLEC, Matthieu
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorROYON, Arnaud
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorBOUSQUET, Bruno
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorBOURHIS, Kevin
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorTRÉGUER-DELAPIERRE, Mona
hal.structure.identifierInstitut de Chimie de la Matière Condensée de Bordeaux [ICMCB]
dc.contributor.authorCARDINAL, Thierry
hal.structure.identifierThe College of Optics and Photonics [Orlando] [CREOL]
dc.contributor.authorRICHARDSON, Martin
hal.structure.identifierCentre de physique moléculaire optique et hertzienne [CPMOH]
dc.contributor.authorCANIONI, Lionel
dc.date.issued2009
dc.identifier.issn1094-4087
dc.description.abstractEnThree-dimensional (3D) femtosecond laser direct structuring in transparent materials is widely used for photonic applications. However, the structure size is limited by the optical diffraction. Here we report on a direct laser writing technique that produces subwavelength nanostructures independently of the experimental limiting factors. We demonstrate 3D nanostructures of arbitrary patterns with feature sizes down to 80 nm, less than one tenth of the laser processing wavelength. Its ease of implementation for novel nanostructuring, with its accompanying high precision will open new opportunities for the fabrication of nanostructures for plasmonic and photonic devices and for applications in metamaterials.
dc.language.isoen
dc.publisherOptical Society of America - OSA Publishing
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/
dc.subject.enNonlinear optics
dc.subject.enPhotosensitive materials
dc.subject.enLaser
dc.subject.enGlass
dc.subject.enFemtosecond phenomena
dc.title.enBeat the diffraction limit in 3D direct laser writing in photosensitive glass
dc.typeArticle de revue
dc.identifier.doi10.1364/OE.17.010304
dc.subject.halChimie/Matériaux
dc.subject.halPhysique [physics]/Physique [physics]/Optique [physics.optics]
bordeaux.journalOptics Express
bordeaux.page10304-10318
bordeaux.volume17
bordeaux.issue12
bordeaux.peerReviewedoui
hal.identifierhal-00408417
hal.version1
hal.popularnon
hal.audienceInternationale
hal.origin.linkhttps://hal.archives-ouvertes.fr//hal-00408417v1
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